NEMS generated electromechanical frequency combs  

作　　者：Sasan Rahmanian Hamza Mouharrar Rana Abdelrahman Masoud Akbari Yasser S.Shama Kevin Musselman David Muñoz-Rojas Skandar Basrour Eihab Abdel Rahman 

机构地区：[1]Department of Systems Design Engineering,University of Waterloo,Waterloo,ON N2L 3G1,Canada [2]Renewable Energy Engineering Department,Mediterranean Institute of Technology,South Mediterranean University,Lac 2,1053 Tunis,Tunisia [3]Department of Mechanical and Mechatronics Engineering,University of Waterloo,Waterloo,ON N2L 3G1,Canada [4]University Grenoble Alpes,CNRS,Grenoble INP,LMGP,38000 Grenoble,France [5]University Grenoble Alpes,CNRS,Grenoble INP,TIMA,38000 Grenoble,France

出　　处：《Microsystems & Nanoengineering》2025年第1期257-264,共8页微系统与纳米工程(英文)

基　　金：K.M.acknowledges funding from the Canada Foundation for Innovation John R.Evans Leaders Fund(Project 35552);Ontario Research Fund—Research Infrastructure(Project 35552),the Waterloo Institute for Nanotechnology(WIN-NRC seed grant),and a Mitacs Globalink Research Award.

摘　　要：This paper presents a novel technique for low-power generation of frequency combs(FC)over a wide frequency range.It leverages modal interactions between electrical and mechanical resonators in electrostatic NEMS operating in air to provide a simple architecture for FC generators.A biased voltage signal drives the electrical resonator at resonance which is set to match an integer submultiple of twice the mechanical resonator’s resonance.Experimental results demonstrate that the NEMS displacement exhibit more than 150 equidistant peaks in the case of a 2:1 modal interaction and more than 60 equidistant peaks in the case of a 1:1 modal interaction.In both cases,the Free Spectral Range(FSR)was equal to the mechanical resonance frequency.Comparison between the FCs generated by the 2:1 and 1:1 modal interactions demonstrate the superiority of the former in terms of bandwidth and stability.The superior phase coherence of the FC generated via the 2:1 modal interaction was demonstrated via time-domain analysis.Our technique has the flexibility to generate multiple frequency combs and to fine-tune their FSR depending on the number of mechanical modes accessible to and the order of the activated modal interaction.It can be integrated into portable devices and is well aligned with modern miniaturization technology.

关 键 词：biased voltage signal mechanical resonator s frequency combs modal interactions electrostatic nems electrostatic NEMS electrical mechanical resonators electrical resonator 

分 类 号：TN752[电子电信—电路与系统]