Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes  

作　　者：Bo Xu Zejuan Zhang Jiaze Qin Jiaqi Wu Luming Wang Jiankai Zhu Chenyin Jiao Wanli Zhang Juan Xia Zenghui Wang 

机构地区：[1]Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054,China [2]Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices,Hubei University,Wuhan 430062,China [3]State Key Laboratory of Precision Measuring Technology and Instruments(Tianjin University),Tianjin 300350,China [4]School of Integrated Sciences and Engineering(Exemplary School of Microelectronics),University of Electronic Science and Technology of China,Chengdu 610054,China [5]State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China

出　　处：《Microsystems & Nanoengineering》2025年第1期313-320,共8页微系统与纳米工程(英文)

基　　金：support from the National Science Fund for Distinguished Young Scholars(Grant No.T2325007);Opening Foundation of Hubei Key Laboratory of MicroNanoelectronic Materials and Devices(Grant No.K202307);National Natural Science Foundation of China(Grant Nos.62450003,62404029,62401104,U21A20459,62250073,61774029);Opening Foundation of State key laboratory of precision measuring technology and instruments(Tianjin University)(Grant No.Pilab2411);China Postdoctoral Science Foundation(Grant Nos.GZB20230107,GZB20240109);Natural Science Foundation of Sichuan Province(Grant Nos.2024NSFSC1408,2024NSFSC1430).

摘　　要：Nanoelectromechanical systems(NEMS)based on atomically-thin tungsten diselenide(WSe_(2)),benefiting from the excellent material properties and the mechanical degree of freedom,offer an ideal platform for studying and exploiting dynamic strain engineering and cross-scale vibration coupling in two-dimensional(2D)crystals.However,such opportunity has remained largely unexplored for WSe_(2)NEMS,impeding exploration of exquisite physical processes and realization of novel device functions.Here,we demonstrate dynamic coupling between atomic lattice vibration and nanomechanical resonances in few-layer WSe_(2)NEMS.Using a custom-built setup capable of simultaneously detecting Raman and motional signals,we accomplish cross-scale mode coupling between the THz crystal phonon and MHz structural vibration,achieving GHz frequency tuning in the atomic lattice modes with a dynamic gauge factor of 61.9,the best among all 2D crystals reported to date.Our findings show that such 2D NEMS offer great promises for exploring cross-scale physics in atomically-thin semiconductors.

关 键 词：dynamic strain engineering dynamic tuning nanomechanical resonance cross scale mode coupling nanoelectromechanical systems terahertz atomic lattice vibration exploration exquisite physical processes nanoelectromechanical systems nems based 

分 类 号：O469[理学—凝聚态物理]