A MEMS traveling-wave micromotor-based miniature gyrocompass  

作　　者：Jinxuan Xie Tong Zhou Yu Chen Yi Zhou Bo Jiang Jing Zhang Zhenjun Wang Wentao Li Han Sun Xuyang Zhu Xiaoshi Li Tianyu Yang Yan Su 

机构地区：[1]School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing,China [2]Jiangsu Research Center for Intelligent Navigation and Control of Complex Motion,Nanjing,China [3]Microsystem and Terahertz Research Center,China Academy of Engineering Physics,Chengdu,China [4]Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang,China

出　　处：《Microsystems & Nanoengineering》2025年第1期335-346,共12页微系统与纳米工程(英文)

基　　金：supported by the National Basic Research Foundation(Grant No.5140508A0501).

摘　　要：Traditional gyrocompasses,while capable of providing autonomous directional guidance and path correction,face limitations in widespread applications due to their large size,making them unsuitable for compact devices.Microelectromechanical system(MEMS)gyrocompasses offer a promising alternative for miniaturization.However,current MEMS gyrocompasses require the integration of motor rotation modulation technology to achieve high-precision north-finding,whereas conventional motors in previous research introduce large volume and residual magnetism,thus undermining their size advantage.Here,we innovatively propose a miniature MEMS gyrocompass based on a MEMS traveling-wave micromotor,featuring the first integration of a chip-scale rotational actuator and combined with a precise multi-position braking control system,enabling high accuracy and fast north-finding.The proposed gyrocompass made significant advancements,reducing its size to 50×42.5×24.5 mm^(3)and achieving an azimuth accuracy of 0.199°within 2 min,which is half the volume of the smallest existing similar devices while offering twice the performance.These improvements indicate that the proposed gyrocompass is suitable for applications in indoor industrial robotics,autonomous driving,and other related fields requiring precise directional guidance.

关 键 词：traveling wave micromotor GYROCOMPASS motor rotation modulation technology MINIATURIZATION north finding conventional motors path correctionface autonomous directional guidance 

分 类 号：TH7[机械工程—仪器科学与技术]