Comparative analysis of nanomechanical resonators:sensitivity,response time,and practical considerations in photothermal sensing  

作　　者：Kostas Kanellopulos Friedrich Ladinig Stefan Emminger Paolo Martini Robert G.West Silvan Schmid 

机构地区：[1]Institute of Sensor and Actuator Systems,TU Wien,Gusshausstrasse 27-29,Vienna 1040,Austria

出　　处：《Microsystems & Nanoengineering》2025年第1期347-363,共17页微系统与纳米工程(英文)

基　　金：funding from the Novo Nordisk Foundation under project MASMONADE with project number NNF22OC0077964,and from the European Innovation Council under the European Union’s Horizon Europe Transition Open program(Grant agreement:101058711-NEMILIES).

摘　　要：Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy,and infrared detection.In this approach,the nanomechanical resonator detects shifts in resonant frequency due to photothermal heating.However,the relationship between photothermal sensitivity,response time,and resonator design has not been fully explored.This paper compares three resonator types-strings,drumheads,and trampolines-to explore this relationship.Through theoretical modeling,experimental validation,and finite element method simulations,we find that strings offer the highest sensitivity(with a noise equivalent power of 280 fW/Hz^(1/2)for strings made of silicon nitride),while drumheads exhibit the fastest thermal response.The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature.Finally,the impact of photothermal back-action is discussed,which can be a major source of frequency instability.This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors,benefiting a wide range of applications.

关 键 词：nanomechanical resonator theoretical modelingexperimen infrared detectionin photothermal sensing response time resonator design frequency sensitivity nanomechanical resonators 

分 类 号：O4[理学—物理] TP212[自动化与计算机技术—检测技术与自动化装置]