大面积高功率940 nm光子晶体面发射激光器  

Large-area High Power 940 nm Photonic Crystal Laser

作　　者：唐英翔 王超 肖垚 张志成[3] 罗晨 仲崇喜 张燕 赵武 李顺峰 王文鑫 王俊 TANG Yingxiang;WANG Chao*;XIAO Yao;ZHANG Zhicheng;LUO Chen;ZHONG Chongxi;ZHANG Yan;ZHAO Wu;LI Shunfeng;WANG Wenxin;WANG Jun(College of Electronic Information,Huaiyin Institute of Technology,Huaian 223003,China;Collegel of Electronic Information,Sichuan University,Chengdu 610041,China;Frontier Interdisciplinary College,National University of Defense Technology,Changsha 410003,China;Suzhou EverBright Photonics Co Ltd,Suzhou 215163,China)

机构地区：[1]淮阴工学院电子信息工程学院,江苏淮安223003 [2]四川大学电子信息学院,四川成都610041 [3]国防科技大学前沿交叉学科学院,湖南长沙410003 [4]苏州长光华芯光电技术股份有限公司,江苏苏州215163

出　　处：《发光学报》2025年第4期713-720,共8页Chinese Journal of Luminescence

摘　　要：光子晶体面发射激光器(PCSEL)可以利用带边谐振效应实现大面积相干振荡,是一种能实现高亮度单模激射的新型半导体激光器。这使得PCSEL在激光雷达与3D传感等领域具有很好的应用前景。本文设计了一种正方单晶格非对称锥形空气孔结构的PCSEL,通过增加光子晶体占空比提高基模与高阶模之间的阈值差异,实现大模式面积下高功率单模激光输出。实验表明,研制的940 nm PCSEL在10μs脉冲泵浦下输出功率达到5.1 W,斜率效率达到0.43 W/A,其远场光斑呈现出1°发散角的单瓣分布,并具有80%偏振度的线偏振特性;进一步地,在5 ns脉冲条件下,其输出功率高达35 W。该器件的研发可为激光雷达系统提供良好的光源。Photonic crystal surface emitting laser(PCSEL)can achieve large-area coherent oscillation by utilizing band-edge resonance effects,making it a new type of semiconductor laser capable of high-brightness single-mode emission,including highly collimated beams,power scaling with area,and low divergence angles,which gives PC⁃SEL great application prospects in the fields such as lidar and 3D sensing.This paper designs a square single-crystal lattice asymmetric conical air hole structure for the PCSEL.By increasing the duty cycle of the photonic crystal,the threshold difference between the fundamental mode and higher-order modes is enhanced,enabling high-power singlemode laser output over a large mode area.Experimental results show that the developed 940 nm PCSEL achieves an output power of 5.1 W under 10μs wide pulse pumping,with a slope efficiency of 0.43 W/A,and its far-field light spot exhibits a single-lobe distribution with a 1°far-field divergence angle,with a linearly polarized characteristic and an 80%polarization.Furthermore,under 5 ns narrow pulse conditions,the output power reaches as high as 35 W.The development of this device can provide a good light source for laser radar systems.

关 键 词：光子晶体面发射半导体激光器 高功率 非对称锥形 

分 类 号：TN248.4[电子电信—物理电子学]