量热型探测器响应不均匀性快速测量研究  

Rapid Scanning Measurement of Inhomogeneity in Calorimetric Optical Power Detectors

作　　者：王鲁新 李超辰 蔡晋辉 方波 邓玉强[2] WANG Luxin;LI Chaochen;CAI Jinhui;FANG Bo;DENG Yuqiang(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2025年第3期316-322,共7页Acta Metrologica Sinica

基　　金：国家自然科学基金(11874333);河北省重点研发计划(22342001D);中国计量科学研究院探索性创新项目(AKYCX2308-23)。

摘　　要：量热型光功率探测器面响应不均匀性是影响探测器性能的关键参数。受限于热平衡过程,量热型探测器的响应时间较长。为提高量热型光功率探测器不均匀性的测量效率,搭建激光束二维扫描测量系统,通过调整扫描间隔时间的方式进行不均匀性扫描测量实验。对得到的二维原始数据,采用基于图像相似度对比及点阵数据方差计算等方法,对不同扫描间隔时间下得到的不均匀性特征进行统计评估。结果表明,当扫描间隔时间不少于完全响应时间的45%时,快速扫描结果相对于完全响应扫描结果绝对偏差未超过0.2%,随着扫描间隔时间的进一步缩短,快速测量与完全响应测量的差异逐渐增加,当扫描间隔时间减少至完全响应时间的20%以下时,两者间的不等效性扩展至20%。通过实验方法论证了在探测器不完全响应状态下,快速扫描测量不均匀性的可行性,在保证测量结果可靠的基础上,提升了不均匀性测量速度。The inhomogeneity of response is a key parameter for a calorimetric optical detector.Due to the thermal equilibrium process,calorimetric detectors have relative long response time.In order to improve the measurement efficiency of the inhomogeneity of the detectors,a two-dimensional scanning measurement system is constructed,and the scanning experiments are carried out with different scanning interval time,the inhomogeneity characteristics obtained under different scanning interval times are statistically evaluated.Methods based on comparison of the image similarity of the inhomogeneity and the calculation of the variance of the two-dimensional raw data are applied.The results show that when the scanning interval time is no less than 45%of the full response time,the deviation of the rapid scanning is no more than 0.2%compare to the full scanning.With further reduction of the scanning interval time,the difference between the rapid measurement and the full response measurement is gradually increased,results in 20%inequality while the scanning interval time reduced to 20%of the full response time.The feasibility of rapid scanning measurement to measure inhomogeneity under incomplete detector response is experimentally demonstrated,which significantly improved the speed of inhomogeneity measurement on the basis of a reliable measurement results.

关 键 词：光学计量 激光功率 量热探测器 均匀性 扫描 快速测量 

分 类 号：TB96[机械工程—光学工程]