超精密大行程OLED喷墨打印装备关键技术与研究进展  

Key Technology and Research Progress of Ultra-precision Large-stroke OLED Inkjet Printing Equipment

作　　者：李奇 汪书辉 周志 黄子祥 刘成忠 LI Qi;WANG Shuhui;ZHOU Zhi;HUANG Zixiang;LIU Chengzhong(Jihua Laboratory,Foshan 528251,China)

机构地区：[1]季华实验室,广东佛山528251

出　　处：《机械制造与自动化》2025年第2期68-73,93,共7页Machine Building & Automation

摘　　要：高分辨率OLED RGB喷墨打印装备对精度有着极高的要求,为此研制一种新型超精密大行程喷墨打印装备。该装备包含多项关键技术,涉及精密机械、振动控制、精密测量、微环境控制等。实验数据表明:所研制的喷墨打印装备具有良好的速度稳定性和定位/重复精度。该精度为OLED RGB喷印工艺中的湿法成膜均匀性提供重要支撑。To meet the extremely high precision requirements by high-resolution OLED RGB inkjet printing equipment,a new type of ultra-precision large-stroke inkjet printing equipment is developed,which contains a number of key technologies involving precision machinery,vibration control,precision measurement,and micro-environment control etc.Its experimental data indicates that the inkjet printing equipment can achieve good speed stability and positioning/repetition accuracy,and provides important support for the uniformity of wet film formation in OLED RGB inkjet printing process.

关 键 词：OLED喷墨打印机 压电–按需式喷墨打印 超精密定位平台 大行程运动平台 振动控制 精密测量 微环境控制 

分 类 号：TH122[机械工程—机械设计及理论]