高取向LaCeFeVO_(6)硅基磁光薄膜的制备与性能  

Preparation and Properties of High-Oriented LaCeFeVO_(6) Si-Based Magneto-Optical Thin Film

作　　者：林楠茜 陈睿妍 许晨浚 谢卓倩 张宏 LIN Nanxi;CHEN Ruiyan;XU Chenjun;XIE Zhuoqian;ZHANG Hong(Key Laboratory of Nondestructive Testing Technology of Fujian Higher Education Fujian Polytechnic Normal University,Fuqing,Fujian 350300)

机构地区：[1]福建技术师范学院无损检测技术福建省高等学校重点实验室,福建福清350300

出　　处：《武夷学院学报》2025年第3期16-24,共9页Journal of Wuyi University

基　　金：国家自然科学基金青年项目(62105063);福建省自然科学基金青创项目(2021J05271)。

摘　　要：开发具有强磁光效应、可以一步生长在半导体硅衬底上的新型磁光薄膜材料,是实现硅基磁光隔离器单片集成的关键所在。采用射频磁控溅射法,在SiO_(2)和Si基底上制备得到了无双折射的立方双钙钛矿型LaCeFeVO_(6)磁光薄膜。结果表明:该薄膜与Si(100)衬底匹配度高,表现出明显的(100)面择优生长取向,并具有较高的成膜质量,粗糙度仅3.14 nm,光学透过性能良好,透过率为60%~70%。磁滞回线显示,LaCeFeVO_(6)/Si薄膜还具有强磁性和显著的垂直磁各向异性,其面外饱和磁化强度达到9.0×10^(4) A/m。另外,LaCeFeVO_(6)的磁圆二向色性椭圆率|ψF|值达到2770(°)/cm,远高于商用石榴石外延磁光薄膜。The development of new magneto-optical thin film materials with strong magneto-optical effect which can be grown on semiconductor silicon substrates in one step is the key to the monolithic integration of Si-based magneto-optical isolators.In this paper,non-birefringent cubic double perovskite LaCeFeVO_(6) magneto-optical thin films were prepared on SiO_(2) and Si substrates by RF magnetron sputtering.The results showed that the film well matched with Si(100)substrate,exhibited obvious(100)-plane preferred growth orientation and high film-forming quality.The roughness of LaCeFeVO_(6)/Si thin film was only 3.14 nm,and its transmittance was about 60%~70%.The magnetic hysteresis loops showed that LaCeFeVO_(6)/Si film also had strong magnetism and significant vertical magnetic anisotropy,and its out-of-plane saturation magnetization reached 90 emu·cm^(-3).In addition,the megnetic circular dichroic ellipticity|ψF|of LaCeFeVO_(6) reached 2770(°)/cm,which was much higher than that of commercial garnet epitaxial magneto optical films.

关 键 词：磁光 薄膜 硅基集成 离子掺杂 双钙钛矿 

分 类 号：TQ174[化学工程—陶瓷工业]