A digital quartz resonant accelerometer with low temperature drift  

一种低温漂的数字石英谐振加速度计

作　　者：CHEN Fubin ZHANG Haoyu YANG Min ZHU Jialin 陈福彬;张浩渝;杨敏;朱嘉林(北京信息科技大学自动化学院,北京100101;北京信息科技大学传感器重点实验室,北京100101)

机构地区：[1]School of Automation,Beijing Information Science and Technology University,Beijing 100101,China [2]Sensor key laboratory,Beijing Information Science and Technology University,Beijing 100101,China

出　　处：《中国惯性技术学报》2025年第3期273-278,共6页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金(61871043);北京市教委科技计划重点项目(KZ201911232023)。

摘　　要：In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.为了抑制温度变化对加速度计性能的影响,采用石英谐振器集群作为敏感元件,制作了一种低温漂的数字石英谐振加速度计。在FPGA中设计了一个数字电路模块,实现集成式谐振器的信号处理与融合,建立了数字石英谐振加速度计的测试系统。在-1 g~+1 g范围内,加速度计样机标度因数达到3561.63 Hz/g,在-10 g~+10 g范围内,加速度计样机标度因数为3542.5 Hz/g,在不同的测试范围加速度计线性相关系数R^(2)都大于0.998。通过恒温试验箱测试加速度计样机的温度漂移,温度变化从-20℃到80℃,通过温度补偿后,零偏温度系数为0.08 mg/℃,标度因数温度系数为65.43 ppm/℃。实验结果表明该数字石英谐振加速度计具有良好的灵敏度和低温度漂移。

关 键 词：quartz resonant accelerometer temperature drift scale factor signal fusion 

分 类 号：TH703[机械工程—仪器科学与技术]