真空气体静压轴承研究进展  

Research Progress of Vacuum Aerostatic Bearing

作　　者：吴剑威[1,2] 王继尧 郑健 赵鹏越 高席丰 温众普 WU Jianwei;WANG Jiyao;ZHENG Jian;ZHAO Pengyue;GAO Xifeng;WEN Zhongpu(Centre of Ultra-precision Optoelectronic Instrumentation Engineering,Harbin Institute of Technology,Harbin 150001;Key Lab of Ultra-precision Intelligent Instrumentation,Ministry of Industry Information Technology,Harbin 150080;Beijing Engineering Research Center of Precision Measurement Technology and Instruments,Beijing University of Technology,Beijing 100124)

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨150001 [2]超精密仪器技术及智能化工业和信息部重点实验室,哈尔滨150080 [3]北京工业大学北京市精密测控技术与仪器工程技术研究中心,北京100124

出　　处：《机械工程学报》2025年第5期13-25,共13页Journal of Mechanical Engineering

基　　金：国家重点研发计划(2022YFF0605104);国家自然科学基金(52175499,52105547);中国博士后基金(2021M700995);黑龙江省博士后基金(LBH-Z21063);中国科协青年托举(2022QNRC001)资助项目。

摘　　要：随着气体静压润滑技术的不断发展及兼容真空工作环境的迫切需求,基于密封设计的真空气体静压轴承已成为近年来的研究热点之一。因其具有高动态、低摩擦、高精度和无污染等优势,在精密加工、检测等领域有着良好的应用前景。从真空气体润滑方式、结构优化及实验研究等三方面入手,详述了真空气体静压轴承的国内外研究现状。对比了真空气体静压轴承相较于传统气体轴承的优缺点,同时归纳了真空气体静压轴承的常规密封方法及高效抽排方式。在此基础上分析了真空气体静压轴承在设计中存在的支承特性、结构设计、加工工艺等关键技术问题,并对真空气体轴承未来发展趋势进行了初步展望,为真空气体静压轴承的设计提供相应依据。With the development of aerostatic lubrication technology and the urgent need of compatible vacuum working environment,vacuum aerostatic bearing based on sealing design has become one of the hot topics.Because of its advantages of high dynamic,frictionless,high precision,and no pollution,it has a good application prospect in precision machining,measurement and other fields.It provides in detail overview of the research status of vacuum aerostatic bearings both domestically and internationally,including lubrication mechanism,structure optimization,and experiment research.The advantages and disadvantages of vacuum aerostatic bearings compared with traditional aerostatic bearings are compared,and the conventional sealing methods and efficient extraction methods of vacuum aerostatic bearings are summarized.On this basis,the critical technical problems such as support characteristics,structural design,and processing technology that need to be solved in the design of vacuum aerostatic bearings are analysed,and the future development trend of vacuum aerostatic bearings is preliminarily prospected,which provides the corresponding basis for the design of vacuum aerostatic bearings.

关 键 词：真空气体静压轴承 轴承密封 静态特性 结构优化 实验研究 

分 类 号：TH133[机械工程—机械制造及自动化]