基于八芯光纤的微双臂马赫-曾德尔干涉仪光纤曲率传感器  

A Curvature Fiber Sensor Based on Mini-Two-Path Mach-Zehnder Interferometer with Eight-Core Fibers

作　　者：季思含 曹蕾 潘思佳 刘杰 钱嘉懿 庄浩然 朱晓军[1] 赵继聪 JI Sihan;CAO Lei;PAN Sijia;LIU Jie;QIAN Jiayi;ZHUANG Haoran;ZHU Xiaojun;ZHAO Jicong(Jiangsu Key Laboratory of Semicibdyctir Device and Integrated Circuit Design,Packaging and Testing,School of Microelectronics and Integrated Circuits,School of Information Science and Technology,Nantong University,Nantong Jiangsu 226019,China;Gansu Yinguang Juyin Chemical Industry Co.,Ltd.,Baiyin Gansu 730999,China)

机构地区：[1]南通大学微电子学院(集成电路学院),信息科学与技术学院,半导体器件与集成电路设计封测省高校重点实验室,江苏南通226019 [2]甘肃银光聚银化工有限公司,甘肃白银730999

出　　处：《传感技术学报》2025年第3期402-407,共6页Chinese Journal of Sensors and Actuators

摘　　要：提出并验证了一种基于八芯光纤(Eight-Core Fiber, ECF)用于曲率测量的微型双臂马赫-曾德尔干涉仪(Mini-Two-Path Mach-Zehnder Interferometer, MTP-MZI)传感器。该传感器的传感臂由单模光纤(Single-Mode Fiber, SMF)与ECF直接熔接而形成在线型马赫-曾德尔干涉仪(Inline Mach-Zehnder Interferometer, IMZI),参考臂为SMF。两臂采用简单的电弧放电技术直接熔接而成。在曲率实验中,采用三种不同长度的ECF与SMF组成不同的传感臂进行曲率检测。实验结果发现,在同样的曲率范围内,IMZI结构的传感器无明显干涉现象,或有干涉现象时,灵敏度极低。当曲率变化范围为0~0.078 37 m-1时,曲率灵敏度仅为5.503 dB/m-1。而使用所提出的MTP-MZI,其传感器具有明显的干涉现象。在相同的曲率范围内,即0~0.078 37 m-1时,最大曲率灵敏度为-50.382 dB/m-1。对比实验结果表明,双臂结构能够有效提高传感器的灵敏度,为制备结构简单、体积小、成本低、易解调的光纤传感器提供了一种有效方法和途径。A curvature fiber sensor with a mini-two-path Mach-Zehnder interferometer(MTP-MZI)structure based on eight-core fiber(ECF)for low-sensitivity curvature detection is proposed and demonstrated.The sensing path is an in-line MZI(IMZI)structure that di-rect sandwiches the ECF between two sections of single-mode fiber(SMF)and the reference path is a single-mode fiber only.A simple arc discharge technology is used to fabricate the MTP-MZI.In this experiment,three different lengths of ECF and SMF are used to con-struct interferometers with different interference lengths,resulting in different curvature sensitivities.When the curvature changes from 0-0.07837 m-1,IMZI has no obvious interference phenomenon or extremely low sensitivity(only 5.503 dB/m-1),while MTP-MZI pro-posed has obvious interference and the maximum curvature sensitivity is-50.382 dB/m-1.The comparable experiment illustrates that the MTP-MZI structure can effectively enhance the sensors sensitivity and provide an effective method to prepare a good-performance sensor with low-cost,miniaturized,and simple requirement technology.

关 键 词：马赫-曾德尔干涉仪 八芯光纤 微双臂 曲率传感 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]