电场调制下石墨烯基气体传感器氨气响应性能研究  

Study on Ammonia Response Performance of Graphene Based Gas Sensor under Electric Field Modulation

作　　者：赵珉 褚卫国[2] 刘桂英 纪捷先 ZHAO Min;CHU Weiguo;LIU Guiying;JI Jiexian(School of Electronic and Electrical Engineering,Lingnan Normal University,Zhanjiang Guangdong 524048,China;National Center for Nanoscience and Technology,Beijing 100190,China)

机构地区：[1]岭南师范学院电子与电气工程学院,广东湛江524048 [2]国家纳米科学中心,北京100190

出　　处：《传感技术学报》2025年第3期442-450,共9页Chinese Journal of Sensors and Actuators

基　　金：广东省普通高校重点领域专项项目(2022ZDZX1016);湛江市科技发展专项资金竞争性分配项目(2021A05035)。

摘　　要：为实现室温下石墨烯基气体传感器对氨气的快速、灵敏和稳定响应,设计了一种具有场效应管结构的器件,并对比了背栅电压对原始石墨烯器件、Au或Pt单一金属修饰以及Au/Pt双金属修饰的石墨烯器件室温下氨气响应性能的影响。金属修饰使得石墨烯器件的氨气响应强度和恢复时间均有所改善,而Au/Pt双金属修饰器件的响应性能对背栅电压表现出显著的依赖性,其对200×10^(-6)NH_(3)气体的室温响应时间为54 s、响应强度为-16.2%、恢复时间为4.6 min。基于密度泛函理论计算了在施加垂直电场作用下不同器件敏感区域费米能级附近状态密度、氨气分子吸附能、吸附距离和转移电荷的变化,并讨论了上述器件响应的机制。In order to achieve fast,sensitive,and stable response of graphene-based gas sensors to ammonia at room temperature,a kind of device with field-effect transistor structure is designed and the influences of backgate voltage on the response performance of pristine graphene devices,Au or Pt single-metal-modified graphene devices,and Au/Pt bimetallic-modified graphene devices to ammonia at room temperature is compared.Metal modification improves the ammonia response intensity and recovery time of graphene devices,while the response performance of Au/Pt bimetallic-modified devices shows a significant dependence on the back gate voltage with a response time of 54 s,a response of 16.2%and recovery time of 4.6 min for 200×10^(-6)NH_(3).Based on density functional theory,the changes in state density near the Fermi level,adsorption energy,adsorption distance,and transfer charge in sensitive area of different devices are calculated.The response mechanisms of devices mentioned above are also discussed.

关 键 词：石墨烯基室温气体传感器 Au/Pt双金属修饰 NH3检测 响应机制 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]