基于多频磁场的平面二维时栅传感器信号解耦研究  

Research on Signal Decoupling of Planar Two-Dimensional Time Grating Sensor Based on Multi-Frequency Magnetic Field

作　　者：杨继森[1] 文杰 雷旭 吴灼 YANG Jisen;WEN Jie;LEI Xu;WU Zhuo(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《传感技术学报》2025年第3期487-495,共9页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金(51205434,52175454);重庆理工大学研究生教育高质量发展行动计划资助成果(gzlcx20233417)。

摘　　要：电磁式二维时栅位移传感器广泛用于数控机床,人工智能等高精度位移测量领域中,针对二维时栅位移测量需要考虑X方向与Y方向感应信号的耦合问题,对位移解耦方法展开相关研究。首先使用开关混频技术将耦合信号拆分为附带位移信息的直流量与多个高频附加量,其次利用滤波器提取关键位移信息,最终通过ADC采样对位移信息进行解算;针对传感器两路感应信号不经过同一处理电路引入的电气误差,提出了分时复用的方法,控制分时时序,交错处理两路感应信号。实验结果表明,在X、Y方向分别在10 kHz和200 kHz的频率激励下,该二维测量系统有效提高了传感器测量精度,保证了传感器动态性能,X方向原始对极内误差为±32μm,Y方向原始对极内误差为±27.5μm。Electromagnetic two-dimensional time grating displacement sensors are widely used in high-precision displacement measure-ment fields such as CNC machine tools and artificial intelligence.For two-dimensional time grating displacement measurement,it is nec-essary to consider the coupling problem of induction signals in the X direction and Y direction.The displacement decoupling method is developed.Firstly,the switch mixing technology is used to split the coupling signal into DC flow with displacement information and mul-tiple high-frequency additional quantities,then the filter is used to extract the key displacement information,and finally solve the dis-placement information through ADC sampling.For the electrical error introduced by two induction signals not passing through the same processing circuit,a time-division multiplexing method is proposed to control the time-sharing sequence and interleave the two induction signals.The experimental results show that under the excitation of 10 kHz and 200 kHz in the X and Y directions,the two-dimensional measurement system effectively improves the measurement accuracy and ensures the dynamic performance of the sensor.The original alignment error in the X direction is±32μm,the original alignment error in the Y direction is±27.5μm.

关 键 词：二维时栅位移传感器 多频磁场 解耦方法 开关混频 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]