基于标准物质的卤素漏率量值复现方法研究  

Research on Method for Reproducing Halogen Leak Rate Based on Reference Materials

作　　者：黄梓宸 尹强[1] 叶丽芳 贾相锐 陈玲[1,2] 周军红 HUANG Zichen;YIN Qiang;YE Lifang;JIA Xiangrui;CHEN Ling;ZHOU Junhong(Guangdong Provincial Institute of Metrology,Guangzhou 510405,China;National Center for Carbon Metrology(Guangdong),Guangzhou 510405,China)

机构地区：[1]广东省计量科学研究院,广州510405 [2]国家碳计量中心(广东),广州510405

出　　处：《计量科学与技术》2025年第2期9-15,共7页Metrology Science and Technology

基　　金：广东省市场监督管理局科技项目(2024ZC07)。

摘　　要：卤素检漏仪校准所使用的标准漏孔一直以来存在不确定度较大的问题。为了降低卤素漏率量值的不确定度,提出了基于气体标准物质的漏率量值复现方法。经公式推导得到了在特定条件下气体浓度与漏率的转换关系,并通过实验进行了验证。结果表明使用卤素检漏仪测量复现漏率与标准漏孔漏率的一致性良好(两组实验归一化偏差为0.41及0.21)。分析了标准物质复现漏率的不确定度来源,包括气体标准物质、吸入流量、温度、压力等,计算并合成各分量,最终得到基于气体标准物质的复现漏率相对扩展不确定度为2.5%(k=2),证明使用气体标准物质进行漏率复现的不确定度水平显著低于常见标准漏孔,同时还具有良好的可操作性。Reference leaks used for calibration of halogen leak detectors have consistently presented high uncertainty issues.To reduce the uncertainty of halogen leak rate values,this study proposes a method for reproducing leak rates based on gas reference materials.Through formula derivation,the conversion relationship between gas concentration and leak rate under specific conditions was established and experimentally verified.Results demonstrated excellent consistency between the reproduced leak rate and the standard leak rate when measured by halogen leak detectors(with normalized deviations of 0.41 and 0.21 in two experiments).The uncertainty sources of the reproduced leak rate were analyzed,including contributions from the gas reference material,intake flow rate,temperature,pressure,molar mass,and gas constant.After calculation and synthesis of these components,the relative expanded uncertainty of the leak rate reproduction based on gas reference material was determined to be 2.5%(k=2).This value is significantly lower than that of common reference leaks,and the method demonstrates good operability.

关 键 词：计量学 气体标准物质 卤素标准漏孔 漏率 不确定度 

分 类 号：TB99[一般工业技术—计量学]