基于QC方法降低CVD单晶金刚石激光加工裂纹研究  

Research on Reducing the Laser Cutting Cracks of CVD Single Crystal Diamond Based on QC Method

作　　者：潘红星 吴晓磊 宋军营 孙宁 PAN Hongxing;WU Xiaolei;SONG Junying;SUN Ning(Zhengzhou Research Institute for Abrasives&Grinding co.,ltd.,Zhengzhou 450001,China;Henan functional diamond Research Institute Co.,Ltd,Zhengzhou 450001,China)

机构地区：[1]郑州磨料磨具磨削研究所有限公司,河南郑州450001 [2]河南省功能金刚石研究院有限公司,河南郑州450001

出　　处：《超硬材料工程》2025年第2期33-38,共6页Superhard Material Engineering

摘　　要：激光切割CVD单晶金刚石生产时易产生裂纹,严重影响了产品价值。为此,基于QC方法,从现状调查、要因确认、制定对策、对策实施、效果检查五个方面,提出了降低CVD单晶金刚石激光切割裂纹的思路和方法。结果表明,在采取相应措施后,切面裂纹降低7.13%,切四周裂纹降低2.72%,有效地改善了切割裂纹问题。The cracks of CVD single crystal diamond are easy to occur during laser cutting,which seriously affects the product value.Therefore,based on the QC method,ideas and methods for reducing cracks in CVD single crystal diamond laser cutting have been proposed from five aspects:current situation investigation,cause confirmation,formulation of countermeasures,implementation of countermeasures,and effect inspection.The results showed that the reduction of sectional cracks was 7.13%,and the reduction of circumferential cracks was 2.72%after the corresponding measures were taken,effectively improving the problem of cutting cracks.

关 键 词：QC方法 单晶金刚石 裂纹 降低 

分 类 号：TQ164[化学工程—高温制品工业]