Effect of nitrogen addition on the structural,mechanical and corrosion proper-ties of FeCoCrMnNiN_(x)high-entropy nitride ceramic thin films  

作　　者：Mehdi Boroujerdnia Ali Obeydavi 

机构地区：[1]Department of Materials Engineering,Ahvaz Branch,Islamic Azad University,Ahvaz,Iran [2]Department of Materials Engineering,Isfahan University of Technology,Isfahan 84156-83111,Iran

出　　处：《International Journal of Minerals,Metallurgy and Materials》2025年第5期1208-1219,共12页矿物冶金与材料学报(英文版)

摘　　要：FeCoCrMnNiN_(x)high entropy nitride ceramics thin films were prepared using the magnetron sputtering method,and the effects of nitrogen content on the thin films’properties were later examined.The addition of N_(2)affected the microstructures of the thin films and their mechanical and corrosion properties.Compared with the FeCoCrMnNi thin films with 1-sccm N_(2),the addition of 2 and 3 sccm of N_(2)by as much as 5.45at%and 6.34at%changed the solid solution’s crystalline structure into an amorphous structure.The addition of nitro-gen caused drastic changes to the surface morphology,creating a smoother and more uniform surface without cauliflower units.The atomic force microscopy image analysis indicated that the addition of nitrogen reduced the surface roughness from 5.58 to 1.82 nm.Adding N_(2)to the CoCrFeMnNi thin film helped increase its mechanical properties,such as hardness and strength,while the Young’s modulus decreased.The hardness of(8.75±0.5)GPa and the reduced Young’s modulus of(257.37±11.4)GPa of the FeCoCrMnNi thin film reached(12.67±1.2)and(194.39±12.4)GPa,respectively,with 1 sccm N_(2).The applied coating of the CoCrFeMnNi thin film on 304SUS increased the corrosion resistance,whereas the addition of nitrogen to the CoCrFeMnNi thin film also improved its corrosion res-istance compared with that of the CoCrFeMnNi thin film without nitrogen.

关 键 词：thin films sputtering high-entropy nitride ceramics structural properties corrosion behavior mechanical properties 

分 类 号：TB3[一般工业技术—材料科学与工程]