Silicon integrated microwave photonics  

作　　者：Yuansheng TAO Zihan TAO Le LI Yichen WU Bitao SHEN Yimeng WANG Luwen XING Wencan LI Huajin CHANG Jingmei ZHANG Haowen SHU Ninghua ZHU Xingjun WANG 

机构地区：[1]State Key Laboratory of Photonics and Communications,School of Electronics,Peking University,Beijing 100871,China [2]Department of Electrical Engineering and State Key Laboratory of Terahertz and Millimeter Waves,City University of Hong Kong,Hong Kong 999077,China [3]Institute of Intelligent Photonics,Nankai University,Tianjin 300071,China [4]Peking University Yangtze Delta Institute of Optoelectronics,Nantong 226010,China [5]Frontiers Science Center for Nano-optoelectronics,Peking University,Beijing 100871,China

出　　处：《Science China(Information Sciences)》2025年第4期96-146,共51页中国科学(信息科学)(英文版)

基　　金：supported by National Key Research and Development Program of China(Grant No.2022YFB2803700);National Natural Science Foundation of China(Grant Nos.62235002,62327811,62322501,623B2004,12204021);China National Postdoctoral Program for Innovative Talents(Grant No.BX20240014)。

摘　　要：The generation,processing,and measurement of microwave signals using optoelectronic technology on compact chips represent a significant trend in the evolution of microwave photonics(MWP).Among various platforms,silicon photonics has emerged as a leading choice,primarily due to its compatibility with established complementary metal-oxidesemiconductor(CMOS)processes.This compatibility enables the complete integration of high-performance radio frequency(RF)links while addressing key challenges such as size,power consumption,cost,and reliability.In this article,we review recent advancements in silicon-integrated microwave photonics,focusing on the developments of device-level integration and system-level applications.At the device level,we highlight critical innovations in silicon-based passive and active components towards MWP concerns,including ultralow-loss waveguides,high-fitness micro rings,large-bandwidth/high-linearity electro-optic modulators,hybrid/heterogeneous integrated lasers and amplifiers on silicon,frequency combs,and more.These breakthroughs form the basic foundation for advancing MWP system-level implementation.At the system-level applications,we concentrate on integrated MWP systems with diverse functionalities on silicon chips,including microwave signal generation,processing,programmable circuits,and measurement systems.Finally,we discuss current challenges and provide insights into the future of silicon-integrated MWP.

关 键 词：silicon photonics microwave photonics broadband signal processing hybrid integration 

分 类 号：TN256[电子电信—物理电子学]