阵列微悬臂梁传感系统的设计与精度评估  

Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System

作　　者：朱静雪 孟青 郭志全[1,2] 赵静楠 杨嫄 Zhu Jingxue;Meng Qing;Guo Zhiquan;Zhao Jingnan;Yang Yuan(Tianjin University of Science and Technology,Tianjin 300222,China;Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry&Food Machinery and Equipment,Tianjin 300222,China;China Special Equipment Inspection And Research Institute,Beijing 100026,China)

机构地区：[1]天津科技大学机械工程学院,天津300222 [2]天津市轻工与食品工程机械装备集成设计与在线监控重点实验室,天津300222 [3]中国特种设备检测研究院,北京100026

出　　处：《应用激光》2025年第2期168-178,共11页Applied Laser

摘　　要：为检测生物大分子,设计一种阵列微悬臂梁传感检测系统。该系统利用光杠杆原理,通过硅基微悬臂梁检测生物大分子。将恒温系统与反应池集成,实现系统的一体化,并使用微移动平台在阵列微悬臂梁间移动光斑。检测平台搭建完成后,对系统进行了调试,并评估了其稳定性和精度。研究表明,传感器的实际分辨率可达0.03μm,利用双金属微悬臂梁的热效应检测出整个传感系统的精准度为96.1%。其分辨率和整个传感系统的精准度已通过双金属微悬臂梁的热效应得到证实,均达到预期的目标。In order to detect bio-molecules,an arrayed micro-cantilever sensing system was designed.The system utilizes the optical lever principle and silicon-based micro-cantilevers to detect bio-molecules.This study integrates a temperature control system with a reaction chamber,achieving system integration,and utilizes a micro-moving platform to move the light spot between the arrayed micro-cantilevers.After constructing the detection platform,the system was calibrated,and its stability and accuracy were evaluated.Experimental results demonstrate that the actual resolution of the sensor can reach 0.03μm,and the accuracy of the entire sensing system,measured using the thermal effect of bimetallic micro-cantilevers,is 96.1%.The achieved resolution and accuracy of the entire sensing system have been confirmed to meet the intended objectives through the utilization of bimetallic micro-cantilevers'thermal effect.

关 键 词：微悬臂梁 传感器 光杠杆原理 热效应 

分 类 号：TN249[电子电信—物理电子学]