压制参数和烧结温度对钼靶致密度和微观组织的影响  

Influence of Pressing Parameters and Sintering Temperature on the Density and Microstructure of Molybdenum Target

作　　者：冯永山 陈飞鹏 李诵斌 李雄斌 李阁平[2] FENG Yongshan;CHEN Feipeng;LI Songbin;LI Xiongbin;LI Geping(Jiangxi Copper Industry Technology Research Institute Co.,Ltd.,Nanchang 330096,Jiangxi,China;Institute of Metals,Chinese Academy of Sciences,Shenyang 110000,Liaoning,China)

机构地区：[1]江西铜业技术研究院有限公司,江西南昌330096 [2]中国科学院金属研究所,辽宁沈阳110000

出　　处：《中国钼业》2025年第2期65-70,共6页China Molybdenum Industry

摘　　要：在粉末冶金工艺制备钼靶材过程中,为探究冷等静压成型和烧结对致密化的影响,提高钼靶材的致密度和细化晶粒尺寸,选用3.2μm一级钼粉作为原料,通过冷等静压成型和不同温度的烧结处理,研究了冷等静压压制压力和时间在不同温度下烧结对钼靶致密度和微观组织的影响。采用金相技术、分析天平、扫描电镜(SEM)等方法表征了钼坯致密度和内部形貌,分析了钼生坯的密度和形貌在压制和烧结过程的变化规律,得到了钼坯压制成型工艺参数与烧结致密化的规律,为提高钼靶材的性能提供依据。采用“台阶”升压至250 MPa并保压3分钟的冷等静压工艺,结合1800℃的烧结温度,制备出致密度97.8%、平均晶粒尺寸38.2μm的钼靶烧结坯。In the process of preparing molybdenum target materials using powder metallurgy technology,in order to investigate the effects of cold isostatic pressing and sintering on densification,improve the density and refine the grain size of molybdenum target materials,3.2μm primary molybdenum powder was selected as the raw material.Through cold isostatic pressing and sintering treatment at different temperatures,the effects of cold isostatic pressing pressure and time on the density and microstructure of molybdenum targets were studied at different temperatures.The density and internal morphology of molybdenum billets were characterized using metallographic techniques,analytical balance,scanning electron microscopy(SEM),and other methods.The changes in density and morphology of molybdenum green billets during pressing and sintering processes were analyzed,and the process parameters of molybdenum billet pressing and sintering densification were obtained,providing a basis for improving the performance of molybdenum target materials.Using a cold isostatic pressing process with a“step”pressure increase to 250 MPa and holding for 3 minutes,combined with a sintering temperature of 1800℃,a molybdenum target 97.8% density and average grain size 38.2μm sintered billet was prepared.

关 键 词：钼靶材 冷等静压成型 烧结 致密化 粉末冶金 

分 类 号：TG146.412[一般工业技术—材料科学与工程]