激光制导系统1064 nm能量衰减器件的研制  

Development of 1064 nm Energy Attenuation Device for Laser Guidance System

作　　者：张静[1,2] 刘桂坪 付秀华[1,2] 林兆文 潘永刚[2,3] 王奔 杨飞 Zhang Jing;Liu Guiping;Fu Xiuhua;Lin Zhaowen;Pan Yonggang;Wang Ben;Yang Fei(College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Zhongshan Research Institute,Changchun University of Science and Technology,Zhongshan 528436,Guangdong,China;Zhongshan Jilian Optoelectronic Technology Co.,Ltd.,Zhongshan 528436,Guangdong,C hina;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学中山研究院,广东中山528436 [3]中山吉联光电科技有限公司,广东中山528436 [4]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《中国激光》2025年第2期90-97,共8页Chinese Journal of Lasers

基　　金：吉林省科技发展计划(20230101008JC);中山市引进创新团队项目(CXTD2023008);中山市社会公益科技研究项目(2022B2005)。

摘　　要：为了保护激光制导系统中探测器的正常运行,需要对信号接收系统的滤光器件透过的能量进行精确衰减。基于F-P滤光膜的设计理论,选用Ta_(2)O_(5)和SiO_(2)作为高低折射率材料进行能量衰减滤光膜的设计。采用电子束离子辅助沉积的方法,在350~1200 nm的波段内,制备了1064 nm高透射、其余波段高截止的能量衰减膜。通过对金属Cr膜的工艺研究,经过多次实验,建立了Cr膜厚度与透射能量之间的数学模型,实现了对1064 nm光谱透射能量的精确衰减,衰减范围为10%~30%,衰减误差为±1%。Objective In a laser guidance system,filter devices extract specific laser signals from targets or lasers,suppress interference from background light,control the energy transmitted by the laser signals,and protect the detectors from contamination or damage.Therefore,the performance of light-filter devices has an important impact on the hit rate and anti-interference ability of laser-guided missiles.In recent years,in-depth research has been conducted on the central wavelength,transmittance,and bandwidth of filter devices at home and abroad,significantly improving their spectral performance.However,there have been few reports on the precise control of the energy of transmitted filter devices with thin films deposition.Consequently,a 1064 nm energy attenuation narrow band filter device was developed according to the filter requirements of the laser guidance system.Methods Based on the design theory of Fabry-Perot(F-P)filter films,Ta_(2)O_(5) was selected as the high-refractive-index material,and SiO_(2) was selected as the low-refractive-index material.A narrowband filter film and broadband interference cut-off film were designed and prepared on both sides of the quartz substrate using electron beams and ion-assisted deposition techniques.Cr was selected as the material for energy attenuation.Subsequently,the refractive index and extinction coefficient values corresponding to Cr with different thicknesses were determined through numerous experiments.Cr films of different thicknesses were deposited on samples with similar initial transmittances,and the relationship between the Cr film thickness and transmittance of the narrow-band light filter device was obtained,thus realizing precise attenuation of the transmission energy of the narrow-band light filter device.Results and Discussions During the preparation of the narrowband filter films,because of the large error in controlling the thickness of the film layers using the quartz crystal method,the transmittance of the prepared narrowband filter films decreased[Fig.8

关 键 词：激光制导系统 窄带滤光膜 宽带截止膜 能量衰减 

分 类 号：O484[理学—固体物理]