A wearable flexible humidity sensor with high-density and large-thickness interdigital electrodes and sensitive CQD bundles for urination monitoring in diapers  

可用于纸尿裤排尿监测的碳量子点纳米束基柔性湿度传感器研究

作　　者：Yuefang Zhao Huabin Yang Qirui Zhang Cheng Lei Na Zhou Rongrui Shi Lei Shi Jintao Wu Houming Luo Haiyang Mao 赵越芳;杨华彬;张起睿;雷程;周娜;史容瑞;石磊;吴晋涛;罗后明;毛海央

机构地区：[1]Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China [2]College of Future Technology,Peking University,Beijing 100091,China [3]University of Chinese Academy of Sciences,Beijing 100049,China [4]North University of China,Key Lab of Instrumentation Science&Dynamic Measurement,Taiyuan 030051,China

出　　处：《Science China Materials》2025年第4期1154-1161,共8页中国科学(材料科学)(英文版)

基　　金：supported by the National Natural Science Foundation of China(62474192,62201567);the Youth Innovation Promotion Association of the Chinese Academy of Sciences(2022048,2022117);the State Key Laboratory of Dynamic Test,which is jointly established by the Province and Ministry,under Open Fund(2022SYSJJ-07)。

摘　　要：This work proposes a fabrication technique that can achieve wafer-level preparation of flexible interdigital electrodes(IDEs)with high-density and large-thickness(HD&LT).Utilizing these HD&LT flexible IDEs,we developed a flexible humidity sensor that employs a composite material made of nanowire bundles with carbon quantum dots(CQDBs)for humidity sensitivity.In this device,the composite material facilitates high absorption and capillary condensation of water molecules across various relative humidity(RH)conditions,while the HD&LT IDEs enhance the effective sensing area.Consequently,we achieve a flexible humidity sensor with exceptional performance.This sensor not only boasts key attributes such as low cost,easy fabrication,and straightforward operation but also establishes a foundation for extensive humidity sensing applications.In comparison to other devices utilizing small-thickness and low-density IDEs,our sensor demonstrates remarkable 2.5-fold and 5.8-fold increase in sensitivity across humidity ranges of 7%-59%RH and 59%-97%RH,respectively.To explore the practical applications of the device,we demonstrate its functionality in diaper humidity detection.With characteristics of wearability and durability,the sensor shows significant potential for humidity monitoring in wearable electronics.本文提出了一种高密度、大厚度柔性叉指电极及其晶圆级制备方法,同时利用纳米森林开发了一种具有丰富活性位点和水分子毛细凝聚效应的碳量子点纳米束(CQDB)复合结构,以之为湿敏材料,构建了基于高密度、大厚度叉指电极的超高性能柔性湿度传感器,与常规器件相比,在7%-59%和59%-97%相对湿度范围内的灵敏度分别提高了2.5倍和5.8倍.此外,该器件还具有成本低、制备简单、操作方便等突出优点,为其获得广泛应用奠定了基础.为了研究该器件的潜在应用价值,论文进一步展示了其在纸尿裤湿度与排尿检测中的功能,表明该传感器在可穿戴湿度监测方面具有重要应用前景.

关 键 词：flexible interdigital electrodes nanowire bundles with carbon quantum dots ELECTROPLATING nanoforests flexible humidity sensors 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]