基于Mworks的洁净室压差运行调节仿真研究  

Simulation Analysis of Differential Pressure Operating Adjustment in Clean Room Based on Mworks

作　　者：任攀 张舒涵 胡娟 REN Pan;ZHANG Shuhan;HU Juan(University of South China)

机构地区：[1]南华大学

出　　处：《上海节能》2025年第4期599-606,共8页Shanghai Energy Saving

摘　　要：为规范洁净室压差的运行调节方法以及确定各房间的最优压力值,亟须建立洁净室在动态运行时各房间压力和管道压力的相互影响关系。在面向对象的多领域建模软件Modelica/Mworks中同时建立洁净室多区域模型和风管模型,对房间压力和管道流量的动态特性进行分析。仿真结果表明,开门过程中两房间压力迅速变化并趋于一致,同空调系统的房间压力呈现先减小后增加的趋势,不同空调系统的房间压力呈现减小的趋势,并且通过合理改变房间的压力设定值可以防止气流的逆向流动,对实现洁净室压力梯度的稳定意义重大。In order to standardize the operating adjustment method of the pressure difference in the clean room and determine the optimal pressure value of each room,it is urgent to establish the mutual influence relationship between the pressure of each room and the pressure of the pipe during dynamic operation of the clean room.A multi-area model and a duct model of the clean room are established simultaneously in the object-oriented multi-domain modeling software Modelica/Mworks to analyze the dynamic characteristics of pressure in the rooms and flow in the pipes.The simulation results show that the pressure in the two rooms changes rapidly and tends to be consistent during the door opening process.The pressure in the room of the same air conditioning system shows a trend of decreasing first and then increasing,and the pressure in the room of different air conditioning systems shows a trend of decreasing.Moreover,by reasonably changing the pressure setting of the room,the reverse flow of the air can be prevented,which is of great significance to achieving the stability of the pressure gradient in the clean room.

关 键 词：运行调节 Mworks 动态特性 压力梯度 

分 类 号：TU831.8[建筑科学—供热、供燃气、通风及空调工程]