基于杠杆制造误差的MEMS谐振加速度计非线性研究  

Nonlinear Study of MEMS Resonant Accelerometer Based on Lever Manufacturing Error

作　　者：李蓉 赵文胜 邓权明 何江波 周吴 LI Rong;ZHAO Wensheng;DENG Quanming;HE Jiangbo;ZHOU Wu(School of Mechanical Engineering,Xihua University;School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China)

机构地区：[1]西华大学机械工程学院 [2]电子科技大学机械与电气工程学院

出　　处：《仪表技术与传感器》2025年第3期11-14,19,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金(52205604,52075082);四川省自然科学基金(2022NSFSC2013);教育部春晖计划合作科研项目(182559)。

摘　　要：为提高MEMS谐振加速度计的线性度,考虑杠杆制造误差,研究了MEMS谐振加速度计的非线性误差。介绍了MEMS谐振加速度计的工作原理,分析利用有限元仿真计算传统四杠杆MEMS谐振加速度计的非线性误差,相比于无制造误差的理想状态,0.6μm制造误差使非线性误差从1.46%增加到2.37%,其主要原因是制造误差使杠杆的支撑梁和输出梁产生不对称。为减小制造误差对谐振加速度计非线性的影响,提出设计一种双杠杆MEMS谐振加速度计,并且仿真计算制造误差对其非线性误差的影响。计算结果表明:相比于四杠杆结构,在0.6μm制造误差的作用下,双杠杆MEMS谐振加速度计的非线性误差降低到1.72%,因此,双杠杆结构能有效降低MEMS谐振加速度计的非线性。In order to improve the linearity of the MEMS resonant accelerometer,the nonlinear error of the MEMS resonant accelerometer was studied considering the lever manufacturing error.The working principle of the MEMS resonant accelerometer was introduced,and then the nonlinear error of the traditional four-lever MEMS resonant accelerometer was calculated by finite element simulation.Compared with the ideal state without manufacturing error,0.6μm manufacturing error increased the nonlinear error from 1.46%to 2.37%.The main reason was that the manufacturing error made the support beam and the output beam of the lever asymmetrical.In order to reduce the influence of manufacturing error on the nonlinear of the resonant accelerometer,a double-lever MEMS resonant accelerometer was proposed and the influence of manufacturing error on the nonlinear error was simulated.The results show that compared with the four-lever structure,the nonlinear error of the dual-lever MEMS resonant accelerometer is redueed to 1.72%under the action of 0.6μm manufacturing error.Therefore,the dual-lever structure can effectively reduce the nonlinearity of the MEMS resonant accelerometer.

关 键 词：MEMS谐振加速度计 杠杆 制造误差 非线性误差 

分 类 号：TH842[机械工程—仪器科学与技术]