温阶环境下基于桥压测温的压力传感器温度补偿  

Temperature Compensation of Pressure Sensor Based on Bridge Voltage Temperature Measurement in Temperature Gradient Environment

作　　者：潘岚青 程新利[1] 王冰 谢南南 PAN Lanqing;CHENG Xinli;WANG Bing;XIE Nannan(School of Physical Science and Technology,Suzhou University of Science and Technology;Kunshan Shuangqiao Sensor Measurement Controlling Co.)

机构地区：[1]苏州科技大学物理科学与技术学院 [2]昆山双桥传感器测控技术有限公司

出　　处：《仪表技术与传感器》2025年第3期15-19,共5页Instrument Technique and Sensor

基　　金：国家重点研发计划项目(2022YFB3206500)。

摘　　要：为了克服压阻式压力传感器在温度分布不均匀环境中温度补偿效果差、压力测量精度低的问题,设计使用惠斯登电桥的桥臂电压测量力敏结构的实际温度,提高传感器温度补偿效果和测量精度。实验采用对比法,实验组和对照组采用相同型号的压力传感器、处理硬件电路、温度补偿算法及补偿温度点,但分别使用Pt1000与桥压测温2种方式进行传感器温度系数补偿。实验发现:高低温实验箱稳态温度环境下,2种方式压力测量精度接近;但在温度变化及温阶环境下,采用Pt1000测温补偿方式的传感器精度出现较大波动,而采用桥压测温补偿方式的传感器精度基本不受影响。实验证明:在复杂温度变化环境下,使用桥压测温补偿方式可以有效保障压力传感器测量精度。To overcome the problems of poor temperature compensation effects and low pressure measurement accuracy of piezoresistive pressure sensors in environments with uneven temperature distribution,a method was designed to measure the actual temperature of the force-sensitive structure using a Wheatstone bridge,aiming to improve the temperature compensation effects and measurement accuracy of the sensor.The experiment adopted a comparative method,the experimental group and the control group used the same type of pressure sensor,processing hardware circuit,temperature compensation algorithm and compensation temperature point,but Pt1000 and bridge pressure temperature measurement were used to compensate the temperature coefficient of the sensor The experiment reveals that in steady-state temperature environments,the accuracy of pressure measurement using both methods is similar.However,under conditions of temperature variation and gradients,sensors compensated using the Pt1000 temperature measurement method exhibits significant fluctuations in accuracy,while those compensated using the bridge voltage temperature measurement method are minimally affected.The results demonstrate that in complex temperature-changing environments,bridge voltage temperature compensation effectively ensures the measurement accuracy of pressure sensors.

关 键 词：桥压测温 温度补偿 硅压阻式压力传感器 温阶 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]