基于硅基的MEMS惯性开关设计与仿真  

Design and Simulation of Silicon-based MEMS Inertial Switches

作　　者：卢晓曼 王瑞 雷程[1] 余建刚 梁庭[1] LU Xiaoman;WANG Rui;LEI Cheng;YU Jiangang;LIANG Ting(North University of China,State Key Laboratory of Dynamic Measurement Technology;Shaanxi Huayan Aero Instrument Co.,Ltd.)

机构地区：[1]中北大学,省部共建动态测试技术国家重点实验室 [2]陕西华燕航空仪表有限公司

出　　处：《仪表技术与传感器》2025年第3期52-57,共6页Instrument Technique and Sensor

基　　金：国家重点研发计划(2023YFB3208500);山西省重点研发计划(2023020302010);中央引导地方科技发展资金项目(YDZJSX20)。

摘　　要：为了降低压膜气体阻尼对惯性开关响应时间的影响,基于硅基设计了一种MEMS惯性开关传感器,通过分析传感器悬臂梁尺寸对传感器最大位移及固有频率的影响和不同尺寸固支结构在100 g载荷的作用下的变形量,确定了惯性开关传感器的具体结构尺寸,悬臂梁的尺寸为1000μm×200μm×40μm,固支结构的宽度为600μm。通过3层键合抽真空工艺降低环境气压,通过COMSOL仿真分析环境气压对开关响应时间的影响,确定随着环境气压减小,开关响应时间减小,结合工艺参数,确定环境气压为50 Pa,仿真分析响应时间为154.4μs,相较于大气压响应时间降低了8.4%。In order to reduce the impact of squeeze film damping on the response time of the inertial switch,a silicon-based MEMS inertial switch sensor was designed.By analyzing the influence of the size of the cantilever beam on the maximum displacement and natural frequency of the sensor and the deformation of the fixed structure with different sizes under 100 g load,the specific structural size of the inertial switch sensor was determined.The size of the cantilever beam was 1000μm×200μm×40μm,and the width of the fixed structure was 600μm.Ambient pressure was reduced through a three-layer bonding vacuum process.COMSOL simulation was used to analyze the impact of ambient pressure on the response time of the switch,and it was determined that the response time of the switch decreased with the decrease of ambient pressure.Combined with the process parameters,the ambient pressure was determined to be 50 Pa,and the response time of the simulation analysis was 154.4μs,which was 8.4%lower than the response time of atmospheric pressure.

关 键 词：MEMS惯性开关 3层键合 压膜气体阻尼 COMSOL有限元仿真 响应时间 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]