微纳电子静电打印:原理、工艺及应用  

Micro/Nano Electrohydrodynamic Printing:Principle,Process and Applications

作　　者：丁毅 岳峻宇 陈昱桦 李家欣 李涤尘[1] 贺健康[1] DING Yi;YUE Junyu;CHEN Yuhua;LI Jiaxin;LI Dichen;HE Jiankang(State Key Laboratory for Manufacturing Systems Engineering,School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]西安交通大学机械工程学院,精密微纳制造技术全国重点实验室,陕西西安710049

出　　处：《电加工与模具》2025年第2期1-14,共14页Electromachining & Mould

基　　金：陕西省重点研发计划项目(2024CY-GJHX-11);咸阳市2024年度重大科技创新专项春种计划专项(L2024-ZDKJ-ZDCGZH-0010);陕西省秦创原“科学家+工程师”队伍建设项目(2023KXJ-174)。

摘　　要：随着电子器件向小型化、集成化、多功能化方向发展,传统电子制造技术在制造精度、材料适应性、工艺灵活性等方面暴露出局限性,而静电打印技术已发展为微纳电子增材制造的一种新手段,故综述了微纳电子静电打印的技术原理、材料工艺及潜在应用。首先,阐述该技术的基本原理,着重介绍了微滴喷射、泰勒锥射流两种打印模式;接着,探讨金属纳米材料油墨、金属前驱体油墨和液态金属等不同电子材料的静电打印工艺特点和适用范围;最后,总结该技术在微纳电路、柔性电子、曲面电子及生物传感等领域的最新应用研究,并展望其未来研究方向,以促进静电打印技术在微纳电子领域的技术发展。As electronic devices become smaller,more integrated and multifunctional,traditional electronic manufacturing technologies reveal limitations in manufacturing precision,material adaptability and process flexibility.Electrohydrodynamic printing technology has emerged as a new method for micro/nano-electronic additive manufacturing.Here,the principle,material process,and potential applications of micro/nano-electronics electrohydrodynamic printing are reviewed.The basic principles are explained,with a focus on drop-ejection and Taylor-cone jetting.The electrohydrodynamic printing characteristics and applicability of different electronic materials,including metal-nanoparticle inks,metal-precursor inks,and liquid metal are analyzed.Recent application research in micro/nano circuits,flexible electronics,conformal electronic and biosensing are summarized.Future research directions are proposed to advance electrohydrodynamic printing technology in the micro/nano electronic field.

关 键 词：微纳静电打印 电子材料与工艺 先进功能电路 电子增材制造 

分 类 号：TG669[金属学及工艺—金属切削加工及机床] TN406[电子电信—微电子学与固体电子学]