半导体划切压电超声换能器径向振动特性分析  

Study on the Radial Vibration of a New Type of Composite Piezoelectric Transducer with Elastic Liner

作　　者：封仕龙 刘磊[1] 汪炜[1] FENG Shilong;LIU Lei;WANG Wei(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2025年第2期66-72,共7页Electromachining & Mould

基　　金：国家自然科学基金项目(51675275)。

摘　　要：径向复合压电换能器安装于轴类部件时,换能器与夹紧部件会产生严重的机械耦合,因此提出一种新型弹性背衬结构,利用有限元方法分析弹性背衬对换能器振动特性的影响,并对换能器进行实际加工。结果表明,弹性背衬Z形弹性连接结构能起到很好的隔振作用,但会降低换能器径向共振频率,由43 920 Hz降至34 715 Hz;增加Z形弹性连接悬臂梁的臂厚或减短悬臂梁的梁长能提高换能器径向共振频率;优化换能器结构,实现转矩和载荷的有效传递,使径向共振频率达到37 316 Hz;加工换能器后测得实际共振频率为36 602 Hz,与仿真结果吻合较好,但受限于装配工艺,换能器阻抗过高,使得换能器在20 V电压下难以达到理论的微米级振幅,实测振幅仅为0.2 μm,若加大激励电压,振幅会显著增大。In order to reduce the mechanical coupling of the transducer and the fixed component,a new type of elastic liner structure was proposed,and the effects of elastic liner on the vibration characteristics of the transducer was analyzed using the finite element method.The results showed that the Z-shaped elastic connection structure of elastic liner has played a good vibration-proof effect,effectively reducing the mechanical coupling of the transducer and the shell,but leading to a decrease in the radial resonance frequency of the transducer.The resonance frequency of the transducer dropped from 43920 Hz to 34715 Hz.In addition,adding the thickens of the Z-shaped elastic connection of the cantilever beam or the shortening of the cantilever beam can increase the radial resonance frequency of the transducer.Then,for the actual application scenario requirements,the converter structure is optimized.The optimized converter can achieve effective transmission of torque and load,and the radial resonance frequency reaches 37316 Hz.Finally,processing the designed converter is processed,and the actual resonance frequency is 36602 Hz,which is better than the simulation.However,due to the impact of the assembly process,the transducer impedance is too high,so that the transducer is difficult to achieve the theoretical micron level amplitude under 20 V voltage,and the actual amplitude is only 0.2μm,but increase the incentive voltage,the amplitude will increase significantly.

关 键 词：压电换能器 径向振动 弹性单元 有限元分析 

分 类 号：TG663[金属学及工艺—金属切削加工及机床]