超灵敏快速石英增强光声传感关键技术及应用(特邀)  

Key Technologies and Applications of Ultrasensitive and Rapid QuartzEnhanced Photoacoustic Sensing(Invited)

作　　者：董磊[1,2] 韩文菲 武红鹏 马维光[1,2] 张雷 尹王保[1,2] 贾锁堂 Dong Lei;Han Wenfei;Wu Hongpeng;Ma Weiguang;Zhang Lei;Yin Wangbao;Jia Suotang(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan 030006,Shanxi,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,Shanxi,China)

机构地区：[1]山西大学量子光学与光量子器件国家重点实验室,激光光谱研究所,山西太原030006 [2]山西大学极端光学协同创新中心,山西太原030006

出　　处：《光学学报》2025年第2期13-26,共14页Acta Optica Sinica

基　　金：国家自然科学基金(62235010,62175137,62122045,62075119);山西省杰出青年科学基金(20210302121003)。

摘　　要：概述了近年来基于石英增强光声光谱(QEPAS)实现超灵敏快速痕量气体传感的关键技术及其应用。首先,讨论了不同类型声学腔与石英音叉(QTF)的耦合机制,以及它对提高QEPAS系统灵敏度的影响。设计合适的声学腔可以有效地放大光声信号,从而提高传感器的检测灵敏度。其次,介绍了一种无需预先校准且响应速度更高的拍频石英增强光声光谱(BF-QEPAS)技术。重点阐述了定制QTF的设计理论,以及结合定制音叉QEPAS的一些技术突破。介绍了超灵敏快速石英增强光声传感在环境监测、医疗诊断、电力系统安全监测等领域的应用,并展望了未来超灵敏快速QEPAS技术在新型激发光源、微型化传感器等方面的发展趋势。Significance The development of ultrasensitive and rapid trace gas sensing techniques is of significance in diverse scientific and technological fields.Accurately detecting and monitoring trace gases at low concentrations are crucial for a wide range of applications,including environmental monitoring,non-invasive breath analysis,and industrial process control.Trace gas sensors play a vital role in assessing air quality,monitoring greenhouse gas emissions,and studying atmospheric chemistry.Real-time on-site detection of pollutants is essential for effective environmental protection and understanding the influence of human activities on climate change.Non-invasive breath analysis using trace gas sensors provides a promising approach for diagnosing and monitoring various diseases.Non-invasive respiratory diagnosis can be applied to the detection of CO_(2)excreted by the skin and the analysis of NH_(3)exhaled by the human body,which has medical significance and application prospect.In various industrial processes,monitoring trace gas concentrations is crucial for ensuring product quality,optimizing efficiency,and detecting leaks.Applications include monitoring gas purity in semiconductor manufacturing,detecting leaks in pipelines,and controlling emissions from industrial facilities.Highvoltage equipment such as gas-insulated switchgear(GIS)relies on insulating gases like sulfur hexafluoride(SF_(6)).However,these gases can decompose over time,forming byproducts that compromise equipment performance and pose safety risks.Early detection of these decomposition products by adopting trace gas sensors is critical for maintaining the reliability and safety of power grids.Progress Laser-based absorption spectroscopy techniques,especially those exploiting the photoacoustic effect,have emerged as powerful tools for trace gas detection,featuring high sensitivity,selectivity,and rapid response time.Among these,quartz-enhanced photoacoustic spectroscopy(QEPAS)has caught significant attention for its compact size,low cost,and robu

关 键 词：光学传感 超灵敏光声光谱技术 快速拍频气体检测 定制石英音叉 多气体同时检测 

分 类 号：O433.1[机械工程—光学工程]