基于游标效应的并联光纤法布里-珀罗温湿度传感器  

Parallel Fiber Fabry-Perot Temperature and Humidity Sensor Based on Vernier Effect

作　　者：柯欣怡 常建华[1,2] 闵洋 吴新新 胡子怡 Ke Xinyi;Chang Jianhua;Min Yang;Wu Xinxin;Hu Ziyi(School of Electronic and Information Engineering,Nanjing University of Information Science and Technology,Nanjing 210044,Jiangsu,China;Jiangsu Provincial Collaborative Innovation Center for Atmospheric Environment and Equipment Technology,Nanjing University of Information Science and Technology,Nanjing 210044,Jiangsu,China)

机构地区：[1]南京信息工程大学电子与信息工程学院,江苏南京210044 [2]南京信息工程大学江苏省大气环境与装备技术协同创新中心,江苏南京210044

出　　处：《光学学报》2025年第2期87-95,共9页Acta Optica Sinica

基　　金：国家自然科学基金(62175114,62375137)。

摘　　要：提出并制备了一种基于游标效应的并联光纤法布里-珀罗温湿度传感器。该传感器由两个分别填充聚酰亚胺(PI)和聚二甲基硅氧烷(PDMS)的法布里-珀罗空腔并联组成,利用PI腔与PDMS腔的自由光谱范围相接近的特点产生游标效应,可显著提高相对湿度(RH)以及温度灵敏度。PDMS作为温敏材料只对温度敏感,PI作为湿敏材料对温湿度都敏感,通过构造灵敏度系数矩阵,实现对温湿度的同时测量。实验结果表明:在30%~60%的RH范围内,RH灵敏度为1.614 nm/%;在30~33℃的温度范围内,温度灵敏度高达15.611 nm/℃。该传感器结构简单、灵敏度高,在高精度温度监测方面具有广阔的应用前景。Objective Temperature and humidity measurement is crucial for the growth and storage of crops,as well as for industrial monitoring and control.Compared to electronic sensors,fiber optic sensors offer advantages such as strong antiinterference capability,good stability,excellent electrical insulation,and high sensitivity,making them widely used in various fields.Among them,fiber optic Fabry-Perot interferometric sensors can detect even the smallest changes in physical quantities with high sensitivity,compact size,and light weight.In recent years,with the increasing demand for environmental monitoring,the simultaneous measurement of temperature and humidity has gained increasing attention.However,most fiber optic temperature and humidity sensors either have low sensitivity or cannot measure the both parameters simultaneously.Therefore,developing high-sensitivity fiber optic sensors for both temperature and humidity is of significant practical importance.The parallel fiber Fabry-Perot structure enables multiple sensors to operate simultaneously,allowing the monitoring of different physical quantities.The Vernier effect,through the overlap of signals from two interferometers,amplifies the wavelength shift,which significantly improves the sensitivity of fiber optic sensors.Methods The sensor consists of a PDMS cavity and a PI cavity formed between two single-mode optical fibers,operating in parallel.By utilizing the similar free spectral range(FSR)of the PDMS and PI cavities,a Vernier effect occurs when the cavities are combined in parallel.This effect,generated through the superposition and interference of the interferometer signals,amplifies even minute changes in wavelength.For monitoring relative humidity and temperature,the PDMS and PI cavities serve as the reference and sensing cavities,respectively,allowing for high-sensitivity measurements of the both parameters.A single Fabry-Perot interferometer measures relative humidity(or temperature)by tracking the shift in its characteristic wavelength in the reflection

关 键 词：传感器 光纤传感 法布里-珀罗干涉 并联游标效应 温湿度 

分 类 号：TN25[电子电信—物理电子学]