基于马赫-曾德尔点衍射的双模式定量相位成像  

Dual-Mode Quantitative Phase Imaging Based on Mach-Zehnder Point Diffraction

作　　者：董正琼[1] 王婧怡 谢怡君 李泽迪 祝仁龙 聂磊[1] 朱金龙[2] Dong Zhengqiong;Wang Jingyi;Xie Yijun;Li Zedi;Zhu Renlong;Nie Lei;Zhu Jinlong(Hubei Key Laboratory of Modern Manufacturing Quality Engineering,Hubei University of Technology,Wuhan 430068,Hubei,China;State Key Laboratory of Intelligent Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China)

机构地区：[1]湖北工业大学现代制造质量工程湖北省重点实验室,湖北武汉430068 [2]华中科技大学智能制造装备与技术全国重点实验室,湖北武汉430074

出　　处：《光学学报》2025年第1期99-106,共8页Acta Optica Sinica

基　　金：国家自然科学基金资助项目(52405589,52175509,51975191);湖北省科技创新人才基金资助项目(2023DJC048);国家重点研究与发展计划(2023YFF1500900)。

摘　　要：为解决传统离轴数字全息干涉仪无法兼备反射和透射测量模式的局限,提出了一种基于马赫-曾德尔点衍射干涉的双模式定量相位显微成像方法,显微成像部分与干涉部分相对独立。使用透射照明或反射照明时,经过显微系统的物光束进入马赫-曾德尔点衍射光路后,通过分光比为9∶1的分束器将其分束,使用9/10的一束通过针孔滤波器低通滤波后光的作为参考光,保证与1/10的另一束物光具有相近的强度并形成干涉。实验结果表明,其在透射模式下测得石英基底表面刻蚀深度的结果为(101.0±1.6)nm,与标称值(100.5±4.0)nm相比,相对误差约为0.50%,其在反射模式下测得硅基底表面深沟槽刻蚀深度的结果为(210.7±1.5)nm,与商用白光干涉仪测量均值212.4 nm相比,相对误差约为0.80%,验证了所提出双模式定量相位成像测量方法的有效性。Objective Current digital holographic microscopy systems that can perform both transmission and reflection measurements are limited in availability.Typically,traditional digital holographic microscopes utilize Michelson interferometry for reflection measurements and Mach-Zehnder interferometry for transmission measurements,each confined to a single mode.To overcome these limitations,recent studies have aimed at improving traditional interferometric structures to support dual measurement modes.However,these systems often require complex adjustments to switching modes,such as installing cube beam splitters and repositioning complementary metal oxide semiconductor(CMOS),which adds to operational complexity and reduces efficiency.In addition,some systems using common-path offaxis interferometry reply on diffraction gratings for beam splitting,necessitating the replacement of gratings with different constants when changing objective lens magnification,along with adjustments to the filtering aperture.To address these challenges,we propose a low-cost dual-mode quantitative phase microscopic imaging method,using conventional optical components.The proposed method employs a Mach-Zehnder point diffraction interferometric structure,directly filtering the object light to produce a reference beam for interference with the object light.This design enhances flexibility in illumination for the microscopic imaging component and integrates transmission and reflection modes,broadening the range of measurable scenarios without requiring equipment changes or complex adjustments.Methods The dual-mode quantitative phase microscopic imaging method utilizes Mach-Zehnder point diffraction interferometry,with the imaging component functioning independently from the interferometric component.During transmission or reflection illumination,the object beam passes through the microscopic system into the Mach-Zehnder point diffraction optical path,where a beam splitter with a 9∶1 ratio divides it.One beam,accounting for 90%of the total intensi

关 键 词：测量 离轴数字全息 马赫-曾德尔干涉仪 点衍射 双模式定量相位显微成像 

分 类 号：O436.1[机械工程—光学工程]