基于多系统协同测量的光轴量化表征方法  

Quantitative Characterization of Optical Axes Based on Multi-System Collaborative Measurements

作　　者：左志伟 林雪竹[1,2] 付西红[3,4] 郭丽丽 杨帆 杨业涛 雷昱 李治国 Zuo Zhiwei;Lin Xuezhu;Fu Xihong;Guo Lili;Yang Fan;Yang Yetao;Lei Yu;Li Zhiguo(College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Zhongshan Institute of Changchun University of Science and Technology,Zhongshan 528437,Guangdong,China;Xi’an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710019,Shaanxi,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学中山研究院,广东中山528437 [3]中国科学院西安光学精密机械研究所,陕西西安710019 [4]中国科学院大学,北京100049

出　　处：《光学学报》2025年第1期107-117,共11页Acta Optica Sinica

基　　金：国家重点研发计划“引力波探测”重点专项(2021YFC2202100);长春理工大学中山研究院引进创新科研团队项目(CXTD2023006);中国科学院西安光学精密机械研究所专项自主部署项目(S22-033);吉林省教育厅科学技术研究项目(JJKH20240926KJ)。

摘　　要：针对离轴、偏轴多反光学系统空间布局复杂、装调难度大和光轴难以表征的问题,提出一种基于多系统协同测量的光轴量化表征方法。首先,建立数字化多系统协同测量场模型,对不同测量坐标系进行统一;其次,通过点源显微镜在测量场实现光轴的量化表征及机械-光学基准传递,并基于光学基准调整镜组位姿;最后,对光轴量化表征的精度进行分析,形成一套成熟的装调工艺方法。利用该方法完成了离轴三反光学系统的装调,实验结果表明:光轴标定的位置精度优于25μm,理想光轴与实际光轴之间的偏心低于10″,初始装调完成后光学系统中心视场的波像差RMS优于0.07λ@632.8 nm,接近设计指标0.05λ@632.8 nm。所提方法为后续系统精装调提供了技术支撑。Objective Large-scale complex optical-mechanical systems are widely applied in high-tech fields like aerospace,space remote sensing,and lithography.As the apertures of ground-based astronomical telescopes and space-based complex optical systems keep increasing,optical systems show characteristics such as large-scale non-coplanar spatial structures,multi-load integrated optical layouts,multi-band shared apertures,and higher precision requirements.Meanwhile,the extensive application of novel design structures and special optical elements has exponentially increased the difficulty and complexity of aligning and assembling optomechanical systems,posing new challenges to the assembly process.The assembly precision of large optomechanical systems is one of the key factors affecting imaging quality and performance metrics,and it is also a critical aspect in determining whether a theoretical design can be successfully transformed into a high-performance optical device.The design and alignment of optical systems usually center around the optical axis.However,due to the invisibility of the optical axis,specific alignment techniques are needed for the initial alignment of complex optomechanical systems.Currently,initial alignments often rely heavily on the experience of assembly personnel,which brings in significant human errors,resulting in unstable measurement results and poor image quality.This also increases labor costs and assembly time.Moreover,measurement devices are relatively independent,lacking interconnection,and their data cannot be unified.Therefore,it has become more and more urgent to research digital and data-traceable assembly processes for complex optomechanical systems.Methods To address the issues of complex spatial layout,difficult alignment and adjustment,and the hard characterization of optical axes in off-axis and eccentric multi-reflection optical systems,we propose a quantitative characterization method for optical axes based on multi-system collaborative measurements.First,we establish a digital m

关 键 词：大型复杂光机系统 光轴量化表征 多系统协同测量 初始装调 测量精度 

分 类 号：TH741[机械工程—光学工程]