透射式Tolansky干涉圆环椭圆化现象分析与验证  

Analysis and Verification of Ellipticalization Phenomenon in Transmission Tolansky Interference Rings

作　　者：许子杰 张宝武[1] 朱玲 方振远 罗贤欢 孙怡[1] 张斌[1] Xu Zijie;Zhang Baowu;Zhu Ling;Fang Zhenyuan;Luo Xianhuan;Sun Yi;Zhang Bin(College of Metrology Measurement and Instrument,China Jiliang University,Hangzhou 310018,Zhejiang,China)

机构地区：[1]中国计量大学计量测试与仪器学院,浙江杭州310018

出　　处：《光学学报》2025年第1期273-282,共10页Acta Optica Sinica

基　　金：国家市场监督管理总局科技计划(2022MK220);国家重点研发计划(2023YFF0616203,2021YFF0603300)。

摘　　要：针对透射式Tolansky干涉测量中干涉圆环椭圆化现象,首先基于平行平板成像特性分析了平行平板厚度、光线入射角度、CCD与点光源间距这三者导致椭圆化的机理,建立了三者与离心率之间的关系式,然后,通过Matlab实现了这种关系式的可视化,展示了离心率随三种影响因素的变化趋势,最后,通过Zemax仿真与实体实验相结合的方式进行交叉验证,结果显示椭圆化现象是由光线在子午面与弧矢面上偏折状况不同造成的,且椭圆离心率与光线入射角度、平行平板厚度呈正相关,与CCD较点光源距离呈负相关,这为后续利用透射式Tolansky干涉进行精密测量时,合理调整以上三种影响因素来有效抑制干涉圆环的椭圆化提供了理论与实验指导。Objective In this paper,we investigate and validate the elliptical deformation phenomenon observed in interference rings generated by transmission Tolansky interference measurements,which significantly influences the accuracy of precision measurements.Transmission Tolansky interference is a critical technique for measuring small angles,surface parallelism,refractive indices,and other parameters in applications such as gravitational wave detection,high-power lasers,wafer lithography,and precision computer numerical control machining.However,elliptical interference rings hinder measurement precision.Thus,we elucidate the mechanisms underlying this deformation and propose strategies to mitigate it,enhancing the reliability of transmission Tolansky interference measurements.Methods The elliptical deformation of interference rings is analyzed using the imaging characteristics of parallel plates.We examine three primary factors influencing eccentricity:parallel plate thickness (d_1),light incidence angle (I),and distance between CCD camera and point light source (f).Theoretical modeling establishes the relationship between these factors and eccentricity (e) using geometric optics and interference principles.MATLAB is employed to visualize this relationship,demonstrating trends in eccentricity variation with changes in the three parameters.Zemax simulations corroborate the theoretical predictions,revealing a positive correlation of eccentricity with light incidence angle and parallel plate thickness,and a negative correlation with CCD-to-point light source distance.To validate these findings,we conduct physical experiments using a 632.8 nm helium-neon laser,a rotatable parallel plate,a beamsplitter,and a CCD camera.By systematically varying the parameters,we observe morphological changes in the interference rings and quantify their eccentricity.Results and Discussions Theoretical analysis and MATLAB visualizations demonstrate that eccentricity increases with parallel plate thickness (d_1) and light incidence angle (I) w

关 键 词：物理光学 透射式Tolansky干涉 干涉同心圆环 椭圆化 

分 类 号：O436[机械工程—光学工程]