Piezoelectric Materials Full-Matrix Constants Characterization Based on Local Electrodes Using One Sample  

作　　者：FENG Qiyun WU Xiaosheng ZHAO Junjun ZENG Zhaofeng LI Jian YIN Chengbin 冯其云;吴校生;赵俊军;曾照丰;李健;尹承彬

机构地区：[1]National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Department of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai 200240,China

出　　处：《Journal of Shanghai Jiaotong university(Science)》2025年第2期262-269,共8页上海交通大学学报(英文版)

基　　金：the Professional Technical Service Platform of Shanghai Science and Technology Commission(No.19DZ2291103)。

摘　　要：A novel characterization method for full-matrix constants of PzT-8 piezoceramics based on local electrodes excitation using one sample is proposed to avoid resonant peaks missing and overlapping in the inversion process of resonant ultrasound spectroscopy technology.Elastic matrix,which is sensitive to the resonance spectrum,is obtained by resonant ultrasound spectroscopy.Piezoelectric and dielectric matrices,which are sensitive to the capacitance of driving electrodes,are determined by capacitance inversion.The initial values of elastic constants are deviated by 30%to validate the reliability of this method.The relative errors between measured and inversed values of resonant frequencies are less than 1%and the relative errors of the capacitance are mostly less than 5%.The work has extensive applications in piezoelectric materials characterization.

关 键 词：resonant ultrasound spectroscopy local electrodes capacitance inversion CHARACTERIZATION 

分 类 号：TB303[一般工业技术—材料科学与工程]