高分辨率非接触式表面静电电位测试方法  

High-Resolution Non-contact Electrostatic Potential Measurement Method for Material Surfaces

作　　者：满梦华 魏明 蔡娜 马贵蕾 陈亚洲 MAN Menghua;WEI Ming;CAI Na;MA Guilei;CHEN Yazhou(Shijiazhuang Campus,Army Engineering University of PLA,Shijiazhuang 050003 China;Unit 32181 of PLA,Xi'an 710032,China)

机构地区：[1]陆军工程大学石家庄校区,河北石家庄050003 [2]32181部队,陕西西安710032

出　　处：《陆军工程大学学报》2025年第2期58-64,共7页Journal of Army Engineering University of PLA

基　　金：国家自然科学基金(62401623)。

摘　　要：非接触式静电电位测试技术在材料表面静电荷成像、高压绝缘子优化和气固液多相流检测等科学研究与工程实践中应用广泛。针对现有非接触式静电电位测量仪器的空间分辨率低且缺乏空间分辨率标定方法的问题,利用同轴半钢线实现了微型感应电极,基于正反馈电路调理技术设计了高灵敏度静电传感器,结合高精度六轴机械臂实现了高空间分辨率非接触式静电电位测试。设计、仿真并实现了一种具有标准静电场空间分布的校准电极,搭建了原型测试系统,实验验证了所提方法的有效性,结果显示原型系统测试直流和低频交流表面电位分布的空间分辨率均达到了200μm。The technology of electrostatic potential measurement is widely used in scientific research and engineering practices such as electrostatic charge imaging on material surfaces,optimization of high-voltage insulators,and detection of gas-solid-liquid multi-phase flows.In response to the issues of low spatial resolution and the lack of a calibration method for spatial resolution in existing non-contact electrostatic potential measurement instruments,this paper proposes a micro induction electrode utilizing coaxial semi-rigid cable,and a high-sensitivity electrostatic sensor designed based on the positive-feedback circuit conditioning technology.By integrating them with a high-precision six-axis robotic arm,a non-contact electrostatic potential measurement with high spatial resolution was achieved.A calibration electrode with a standard electrostatic field spatial distribution was designed,simulated,and implemented.A prototype testing system was constructed,and the effectiveness of the proposed method was experimentally verified.The results indicate that the spatial resolution of the prototype system in measuring DC and low-frequency AC surface potential distributions reaches 200μm.

关 键 词：静电测试 非接触式 空间分辨率 

分 类 号：TH89[机械工程—仪器科学与技术]