光学曲面的偏折测量技术:原理、挑战与展望(特邀)  

Deflectometric measurement technology for optical surfaces:principles,challenges,and prospects(invited)

作　　者：张祥朝 牛兴漫 郝思远 郎威 李坪峰 刘瑞阳 张宗华[2] ZHANG Xiangchao;NIU Xingman;HAO Siyuan;LANG Wei;LI Pingfeng;LIU Ruiyang;ZHANG Zonghua(School of Information Science and Technology,Fudan University,Shanghai 200438,China;College of Mechanical Engineering,Hebei University of Technology,Tianjin 300401,China)

机构地区：[1]复旦大学信息科学与工程学院,上海200438 [2]河北工业大学机械工程学院,天津300401

出　　处：《光学精密工程》2025年第5期677-701,共25页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52475551,No.U2341275);上海市自然科学基金资助项目(No.24ZR1406800);河北省教育厅科学研究项目(No.JZX2024021)。

摘　　要：偏折术由于其测量系统简单、动态范围大、抗干扰能力强,在复杂光学曲面的面形与缺陷检测方面具有独特优势。但是偏折测量的操作复杂、影响因素多、数据传递链条长,严重限制了其在工程实践中的应用。为此,本文介绍了偏折术的工作原理和发展脉络,列举了主要测量步骤,包括结构设计、系统标定、编码与物像匹配以及积分重构。分析了影响测量精度的几个关键因素,包括相机的模型简化、高度-斜率歧义性、位置-角度测不准以及积分重构的欠定性。随后给出了偏折术的主要应用场景及未来发展趋势,帮助精密测量领域的科研人员及研究生掌握偏折测量方法,明确提高偏折测量精度的主要途径,推动我国精密工程及先进制造领域的技术进步和产业发展。Deflectometry offers distinct advantages for assessing the forms and defects of complex optical surfaces,attributed to its straightforward measurement structure,high dynamic range,and superior antiinterference capabilities.However,the intricate measurement operations,numerous influencing factors,and extensive data transfer chain associated with deflectometry significantly constrain its practical applications in engineering.Accordingly,the fundamental principles and historical development of deflectometry are delineated,and the primary measurement procedures,comprising structural design,system calibration,pattern coding,object-image matching,and integral reconstruction,are described.Several critical factors influencing measurement accuracy are examined,including camera model simplification,heightslope ambiguity,position-angle uncertainty,and the rank-deficiency in form reconstruction.Subsequently,a discussion of the primary application scenarios and future trends of deflectometry is provided,with the objective of assisting researchers and graduate students in mastering deflectometric methodologies,managing key strategies to enhance measurement accuracy,and fostering technological advancements and industrial growth within China’s precision engineering and advanced manufacturing sectors.

关 键 词：精密测量 偏折术 光学曲面 误差分析 缺陷检测 

分 类 号：TH741[机械工程—光学工程]