双层介孔SiO_(2)减反膜的制备及光学性能分析  

Preparation and Optical Properties Analysis of Double-layer Mesoporous SiO_(2)Antireflection Coating

作　　者：张子潮 肖志葳 贾红宝[1] 王颖 朱世海 ZHANG Zichao;XIAO Zhiwei;JIA Hongbao;WANG Ying;ZHU Shihai(School of Science,University of Science and Technology Liaoning,Anshan 114051,China)

机构地区：[1]辽宁科技大学理学院,辽宁鞍山114051

出　　处：《大学物理实验》2025年第2期37-41,共5页Physical Experiment of College

基　　金：辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641,JYTMS20230949);“辽宁科技大学高能光电交叉学科团队”基金。

摘　　要：以三嵌段共聚物F127和阳离子聚合物纳米乳液CPN为模板剂,以正硅酸四乙酯为前驱物,在酸催化的醇体系中制备SiO_(2)溶胶。利用Filmstar薄膜设计软件构建膜系结构,采用提拉法在石英基底上制备出厚度精确可控的双层宽谱带减反射介孔SiO_(2)膜。采用原子力显微镜、扫描电镜、透射电镜、N_(2)吸附-脱附分析仪、紫外-可见-近红外分光光度计等对薄膜形貌、结构和光学性能进行表征分析。结果表明,双层介孔SiO_(2)减反膜在300~800 nm范围内平均透过率实际可高达98.9%。Using triblock copolymer F127 and cationic polymeric nanolatex(CPN)as templates,and tetraethyl orthosilicate(TEOS)as the precursor,SiO_(2)solswereprepared in an acid-catalyzed alcohol system.The film system structure was built using Filmstar thin film design software,and a double-layer broadband antireflective mesoporous SiO_(2)film with precisely controllable thickness was prepared on a quartz substrate using the dip-coating method.The morphology,structure,and optical properties of the film were characterized and analyzed using atomic force microscopy(AFM),scanning electron microscopy(SEM),transmission electron microscopy(TEM),N_(2)adsorption-desorption analyzer,and UV-visible-near-infrared spectrophotometer.The results show that the average transmittance of the double-layer mesoporous SiO_(2)antireflective film can reach up to 98.9%in the 300~800 nm range.

关 键 词：溶胶-凝胶 介孔SiO_(2)薄膜 宽谱带 减反射膜 

分 类 号：O484.5[理学—固体物理]