High-temperature thin-film strain sensors with low temperature coefficient of resistance and high sensitivity via direct ink writing  

作　　者：Lida Xu Fuxin Zhao Xiong Zhou Yusen Wang Tingting Shen Jun Liu Haidong Wang Guo Yi Xingguang Zhou Chao Wu Yang Zhao Daoheng Sun Qinnan Chen 

机构地区：[1]Discipline of Intelligent Instrument and Equipment,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361102,China [2]Shanghai Spaceflight Precision Machinery Institute,Shanghai 201600,China

出　　处：《Nanotechnology and Precision Engineering》2025年第1期1-9,共9页纳米技术与精密工程(英文)

基　　金：the National Key Research and Development Program of China(Grant No.2021YFB2012100);the Major Science and Technology Projects in Fujian Province(Grant No.2023HZ021005);the Open Project Program of Fujian Key Laboratory of Special Intelligent Equipment Measurement and Control(Grant No.FJIES2023KF06);the Industry-University-Research Co-operation Fund of the Eighth Research Institute of China Aerospace Science and Technology Corporation(Grant No.SAST2023-061).

摘　　要：High-temperature thin-film strain sensors are advanced technological devices for monitoring stress and strain in extreme environments,but the coupling of temperature and strain at high temperature is a challenge for their use.Here,this issue is addressed by creating a composite ink that combines Pb_(2)Ru_(2)O_(6) and TiB2 using polysilazane(PSZ)as a binder.After direct writing and annealing the PSZ/Pb2Ru2O6/TiB2 film at 800 XC in air,the resulting thin film exhibits a low temperature coefficient of resistance(TCR)of only 281 ppm/XC over a wide temperature range from 100 XC to 700 XC,while also demonstrating high sensitivity with a gauge factor approaching 19.8.This exceptional performance is attributed to the intrinsic properties of Pb_(2)Ru_(2)O_(6),which has positive TCR at high temperature,and TiB2,which has negative TCR at high temperature.Combining these materials reduces the overall TCR of the film.Tests showed that the PSZ/Pb_(2)Ru_(2)O_(6)/TiB_(2) film maintains stable strain responses and significant signal output even under varying temperature.These findings provide valuable insights for developing high-temperature strain sensors with low TCR and high sensitivity,highlighting their potential for applications in high-temperature strain measurements.

关 键 词：High-temperature thinfilm Strain sensor Direct ink writing Low temperature coefficient of resistance High sensitivity 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]