基于3ω法的热导率测试技术研究进展  

Research Progress of Thermal Conductivity Measurement Technology Based on 3ωMethod

作　　者：李义壮 郭怀新 王瑞泽[1,2] 孔月婵 陈堂胜 LI Yizhuang;GUO Huaixin;WANG Ruize;KONG Yuechan;CHEN Tangsheng(National Key Laboratory of Solid-State Microwave Devices and Circuits,Nanjing 210016,China;Nanjing Electronic Devices Institute,Nanjing 210016,China)

机构地区：[1]固态微波器件与电路全国重点实验室,南京210016 [2]南京电子器件研究所,南京210016

出　　处：《工程热物理学报》2025年第4期1205-1219,共15页Journal of Engineering Thermophysics

基　　金：国家重点研发计划(No.2020YFA0709700);江苏省重点研发计划产业前瞻与关键核心技术项目(No.BE2022070-4)。

摘　　要：热导率是反映材料热性能的重要参数,不管是用于散热还是绝热,对材料热导率的准确测试具有重要意义。本文综述一种适应性强、测试便捷、样品制备简单、测试设备成本低的热导率测试方法—3ω法,首先介绍了利用3ω法测试热导率的基本原理;然后给出不同样品测试结构下热传输数学模型的温升解析解,包括半无限大衬底、薄膜结构、多层结构和细线结构样品;介绍了各种改进的3ω法,包括对薄膜热导率各向异性的测试、可以减少无关因素影响的差分3ω法、通过热穿透深度等效的方式利用阻抗模型拟合热导率的方法,同时介绍了3ω测试技术在传感器上的应用;最后,指出3ω法测试过程中可能的误差来源,以及提升测试精度的方法。本文将有助于研究人员进行热导率测试的研究,对3ω法的设计与分析提供指导。Thermal conductivity is an important parameter reflecting the thermal properties of materials,whether it is used for heat dissipation or insulation.It is of great significance to accurately measure the thermal conductivity of materials.This paper reviews a thermal conductivity measuring method with strong adaptability,convenient testing,simple sample preparation,and low-cost—the 3ωmethod.Firstly,the basic principle of 3ωmethod was introduced.Then the analytical solutions for temperature of heat conduction mathematical models under different sample structures are provided,including semi-infinite substrates,thin film systems,multi-layer structures,and fine rod or filament-like sample.Various improved 3ωmethods are introduced,including the anisotropy of thin film thermal conductivity,differential 3ωmethod that can reduce the influence of irrelevant factors,and the method of fitting thermal conductivity using impedance models through thermal penetration depth equivalence.At the same time,the application of 3ωin sensors are introduced.Finally,the possible errors in the experiment process and the methods to improve the accuracy are analyzed.This paper will help researchers to study the thermal conductivity measurement and provide guidance for the design and analysis of 3ωmethod.

关 键 词：3ω法 热导率 薄膜 各向异性 

分 类 号：O551.1[理学—热学与物质分子运动论]