基于电光采样的飞秒激光精密测距及应用  

Precision femtosecond laser ranging based on electro⁃optic sampling and its applications

作　　者：邱志锋 孙世超 李波瑶 古楚芳 孙敬华 QIU Zhifeng;SUN Shichao;LI Boyao;GU Chufang;SUN Jinghua(Institute of Ultrafast Optics and Photonics,School of Electrical Engineering and Intelligentization,Dongguan University of Technology,Dongguan 523808,China)

机构地区：[1]东莞理工学院电信工程与智能化学院超快光物理与光信息研究所,广东东莞523808

出　　处：《计测技术》2025年第2期80-87,共8页Metrology & Measurement Technology

基　　金：国家重点研发计划项目(2022YFB4601103);广东省量子科学战略专项资助项目(GDZX230‐2002)。

摘　　要：为探索高精度、高速度激光精密测量,研究了基于电光采样定时检测技术的飞秒光频梳精密测距,该光频梳测距系统结合了光纤Sagnac干涉环、动态相位偏置的电光调制器、非互易静态相位偏置单元以及光脉冲飞行时间探测,具备高精度和高速度的优点。研究表明:该系统在26 ms积分时间内可实现45 nm的单点测距不确定度,通过结合二维扫描平移台,实现了量块台阶高度和硬币表面形貌的精密测量;并对3 m外受附近扬声器声波振动的漫反射金属薄膜进行了动态检测,还原了所播放的音乐声信号。本研究展示了电光采样定时检测技术在高精度、高速度距离测量中的巨大潜力,为促进精密测距领域的发展起到重要作用。In order to research high precision and high speed laser measurement technology,this study explores precision ranging using a femtosecond optical frequency comb based on electro-optic sampling timing detection technology.The optical frequency comb ranging system integrates a fiber Sagnac interferometer,electro-optic modulators with dynamic phase bias,non-reciprocal static phase biasing units,and optical pulse time-of-flight detection,offering advantages of high precision and speed.The system achieves a 45 nm single-point ranging uncertainty within a 26 ms integration time.Coupled with a two-dimensional scanning translation stage,it enables precise measurements of step heights on gauge blocks and surface morphology of coins.Additionally,it dynamically detects the diffuse reflections from a metallic film 3 m away influenced by nearby speaker sound waves,faithfully reproducing the played music signals.This study demonstrates the great potential of electro-optic sampling timing detection technology in high precision and high speed distance measurement,playing a significant role in advancing the field of precision ranging.

关 键 词：激光测距 台阶测量 电光采样 光学频率梳 

分 类 号：TB9[一般工业技术—计量学] O439[机械工程—测试计量技术及仪器] TH741[机械工程—光学工程]