芯片级腔光力传感器谐振腔中的可控光机械耦合  

Controllable optomechanical coupling in chip⁃scale cavity optomechanical sensor resonator

作　　者：李喆 鲜承伟 张怀英 匡鹏举 陈凯[1] 黄勇军 LI Zhe;XIAN Chengwei;ZHANG Huaiying;KUANG Pengju;CHEN Kai;HUANG Yongjun(School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;School of Information and Communication Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China;Shaanxi Baocheng Aviation Instrument Co.,Ltd.,Baoji 721006,China)

机构地区：[1]电子科技大学自动化学院,四川成都611731 [2]电子科技大学信息与通信工程学院,四川成都611731 [3]陕西宝成航空仪表有限责任公司,陕西宝鸡721006

出　　处：《计测技术》2025年第2期88-94,共7页Metrology & Measurement Technology

基　　金：国家自然科学基金项目(62371106,U22B2004)。

摘　　要：腔光力传感器作为科技交叉领域的研究热点,其测量分辨力的提升对多种应用场景至关重要。本研究通过调节腔光力传感器中耦合光纤状态来改变腔内光场模态体积,实现光机械耦合的可控性,进而达到光机械耦合的强互锁状态。在二维光子晶体构成的芯片级腔光力传感器谐振腔系统中,成功实现了可控光机械耦合诱导的机械品质因数(Q值)提升和系统底噪的抑制。实验结果表明,在光机械耦合实现强互锁状态下,机械Q值相较弱互锁阶段提升了约10倍,系统底噪显著降低了约26 dB。此外,基于该方案的腔光力加速度传感器在6 kHz的加速度驱动下,实现了高达126.58 mV/g的灵敏度。这一成果不仅证实了可控光机械耦合在增强机械Q值和降低系统底噪方面的潜力,而且为腔光力系统的设计和应用提供了新思路,对光子学和微纳机械系统领域的发展具有重要的推动作用。Cavity optomechanical sensors,as a focal point at the intersection of technology and science,are pivotal for improving sensing resolution across diverse applications.This research modulated the intracavity optical field mode volume by adjusting the optical fiber coupling state to achieve controllable optomechanical coupling,leading to a strong coupling lock state.Within a chip‐scale optomechanical sensor resonator system constructed from two‐dimensional photonic crystals,the study successfully demonstrated the enhancement of mechanical quality factor(Q‐factor)and the suppression of system noise through controllable optomechanical coupling.Experimental results indicate that in the strong optomechanical coupling lock state,the mechanical Q‐factor is increased by approximately 10 times compared to the weak coupling state,and system noise is significantly reduced by about 26 dB.Moreover,the optomechanical accelerometer sensor,based on this scheme,is achieves a sensitivity of 126.58 mV/g under a 6 kHz acceleration drive.This study not only validates the potential of controllable optomechanical coupling in enhancing mechanical Q‐factor and reducing system noise,but also offers new perspectives for the design and application of optomechanical systems,significantly advancing the development in photonic and micro‐nano mechanical systems.

关 键 词：腔光力系统 光机械耦合 二维光子晶体 腔光力传感器 机械品质因数 

分 类 号：TB9[一般工业技术—计量学] O59[机械工程—测试计量技术及仪器] V241.4[理学—应用物理]