一种基于周期波纹衬底上磁性薄膜的平面霍尔传感器设计  

Design of a Planar Hall Sensor Based on Magnetic Film on Periodic Ripple Substrate

作　　者：黄浩洋 王仁茂 邓畅 孙彪 HUANG Haoyang;WANG Renmao;DENG Chang;SUN Biao(The Eighth Research Academy of CSSC,Yangzhou 225101,China;Military Representative Office of Shanghai Burear of Naval Armament Department in Yangzhou,Yangzhou 225001,China)

机构地区：[1]中国船舶集团有限公司第八研究院,江苏扬州225101 [2]海装上海局驻扬州地区军事代表室,江苏扬州225001

出　　处：《舰船电子对抗》2025年第2期112-116,共5页Shipboard Electronic Countermeasure

摘　　要：根据平面霍尔传感器的工作原理,采用周期性波纹衬底诱导磁性薄膜各向异性,以此为基础设计了一种平面霍尔传感器。通过微磁仿真探究波纹尺寸对平面霍尔传感器性能的影响,并基于设计制备了平面霍尔传感器,通过测试证实了其性能。According to the working principle of planar Hall sensors,this paper uses a periodic ripple substrate to induce the anisotropy of the magnetic film,and based on this,designs a planar Hall sensor.The effect of ripple size on the performance of planar Hall sensors is explored through micromagnetic simulation,and the planar Hall sensors are prepared based on the design,then the performance is confirmed through test.

关 键 词：镍铁薄膜 磁各向异性 平面霍尔传感器 

分 类 号：TM352[电气工程—电机]