面向刀具性能测试的柔性薄膜传感器模态分析与优化  

Modal Analysis and Optimization of Flexible Thin Film Sensors for Tool Performance Testing

作　　者：王龙飞 张炜 雷东 Baljit Singh WANG Long-fei;ZHANG Wei;LEI Dong;Baljit Singh(Mechanical Engineering College,Shaanxi Institute of Technology,Xi′an 710300,Shaanxi,China;Shanyang County Vocational Education Center,Shangluo 726400,Shaanxi,China;Faculty of Mechanical Engineering,Universiti Teknologi MARA(UiTM),Shah Alam 40170,Malaysia)

机构地区：[1]陕西国防工业职业技术学院机械工程学院,陕西西安710300 [2]山阳县职业教育中心,陕西商洛726400 [3]马来西亚玛拉工艺大学机械工程学院,马来西亚莎阿南40170

出　　处：《机械研究与应用》2025年第2期17-20,共4页Mechanical Research & Application

基　　金：陕西国防工业职业技术学院重点科研项目:柔性纳米压电薄膜传感器机电耦合特性分析与研究(编号:Gfy21-12);陕西省教育厅2023年度科学研究计划项目:基于深度学习的端到端的风电机组滚动轴承故障诊断研究(编号23JK0320)。

摘　　要：为了解决柔性薄膜传感器在刀具性能测试工作过程中因振动导致的褶皱和脱落问题,该文通过有限元分析软件ABAQUS对其进行模态分析,得到了柔性薄膜传感器的前8阶固有频率和对应振型。然后根据基底层材料的不同,对柔性薄膜传感器进行优化控制,得出了通过降低基底层的厚度、增大基底层弹性模量等措施可有效提升结构的固有频率,避免了传感器在工作过程中因刀具的振动而产生的共振现象,从而为柔性薄膜传感器的生产制造提供一定的参考借鉴。Aiming at the problem such as wrinkling and detachment caused by the vibration of flexible thin film sensors during tool performance testing,the ABAQUS finite element software is used to perform a modal analysis on the flexible thin film sensors,then the first eight natural frequencies and the corresponding vibration modes of the flexible thin film sensor are obtained.Optimization control of the flexible thin film sensors is conducted according to different substrate materials.It is verified that natural frequency of the structure can be effectively improved by reducing the thickness of the substrate layer and increasing the elastic modulus of the substrate layer,and the resonance phenomena caused by the tool vibration can be avoided during operation process of the sensor.It would provide a certain reference for the production and manufacturing of flexible film sensors.

关 键 词：柔性薄膜传感器 模态分析 ABAQUS 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]