大旋转角两轴磁阻式快速反射镜驱动特性研究  

Study on the Driving Characteristics of Two-Axis Magneto-Resistive Fast Steering Mirrors with Large Rotation Angle

作　　者：张青莲 顾雯雯[1] 明奎 ZHANG Qinglian;GU Wenwen;MING Kui(College of Engineering and Technology,Southwest University,Chongqing 400715,China)

机构地区：[1]西南大学工程技术学院,重庆400715

出　　处：《机床与液压》2025年第7期190-194,220,共6页Machine Tool & Hydraulics

摘　　要：为满足高精度光学应用对大偏转角和结构紧凑的两轴式快速反射镜的需求,系统研究了磁阻式快速反射镜的驱动系统,涵盖理论分析、仿真计算和实物实验3个方面。对磁阻式快速反射镜的驱动机制展开分析,通过建立数学模型,深入探究反射镜偏转角度与线圈两侧所施加电压之间的定量关系,为后续设计与优化提供理论基础。利用有限元软件COMSOL进行仿真计算,研究永磁体高度、直径、线圈匝数及永磁体和线圈之间的工作间隙等关键设计参数对快反镜驱动系统的影响,并得到驱动系统最佳参数。基于理论分析和仿真结果制作了快速反射镜样机,并搭建测试平台进行实验验证。结果表明:所制备的快反镜在X、Y轴方向分别产生±70 mrad的偏转角,稳定时间分别为0.13、0.11 s,满足高精度光学系统对大偏转角的要求,同时具备结构紧凑的优点。In order to meet the demands for the two-axis fast steering mirror(FSM)with large deflection angle and compact structure in high-precision optical applications,the driving system of the magneto-resistive FSM was systematically discussed,including theoretical analysis,simulation calculations and physical experiment.The driving mechanism of magneto-resistive FSM was analyzed,and the quantitative relationship between the deflection angle of the mirrors and the voltage applied on both sides of the coil was investigated in depth through the establishment of a mathematical model,which provided theoretical basis for the subsequent design and optimization.By using the finite element software COMSOL,the influence of the height,diameter of the permanent magnet,the number of turns of the coil as well as the working gap between the permanent magnet and the coils on the fast mirror driving system was conducted,and the best parameters were obtained.Based on the theoretical analyses and simulation results,a prototype of above mentioned FSM was manufactured and a test platform was built for experimental verification.The results show that the prepared FSM produces a deflection angle of±70 mrad in the X and Y axes,and the stability time is 0.13 s and 0.11 s,respectively,which can meet the requirement of large deflection angle in the high-precision optical system,and has the advantages of compact structures.

关 键 词：大偏转角 快速反射镜 有限元分析 磁阻式 

分 类 号：TH744[机械工程—光学工程]