非制冷型多波长VCSEL泵浦固体激光器的研究  

Research on uncooled multi-wavelength VCSEL pumped solid-state laser

作　　者：苟栋良 李阳 邱小浪 袁崇献 范鑫烨[1] 李川川 韦欣[2,3] COU Dong-liang;LI Yang;QIU Xiao-lang;YUAN Chong-xian;FAN Xin-ye;LI Chuan-chuan;WEI Xin(School of Physical Science and Information Engineering,Liaocheng University,Liaocheng 252059,China;Nano Optoelectronics Laboratory,Institute of Semiconductor,Chinese Academy of Sciences,Beijing 100083;College of Materials Science and Optoelectronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]聊城大学物理科学与信息工程学院,山东聊城252059 [2]中国科学院半导体研究所纳米光电子实验室,北京100083 [3]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《激光与红外》2025年第4期505-512,共8页Laser & Infrared

摘　　要：固体激光器的应用需求持续增长,传统Nd:YAG激光器因依赖复杂的温控系统面临高成本、高功耗和较差的机械性能等问题,为拓展应用场合函待解决。本文提出一种非制冷型多波长VCSEL泵浦固体激光器设计方案,旨在通过优化多波长VCSEL组合实现宽温区内的高功率稳定输出。研究采用三波长VCSEL阵列作为泵浦源,对尺寸为φ6mm×40mm、掺杂浓度为1.0at.%的Nd:YAG晶体进行侧面泵浦。多波长VCSEL阵列波长互补,有效降低了温度漂移对晶体吸收效率的影响。同时,四面泵浦设计提高了泵浦光程利用率和粒子数反转的均匀性。实验结果表明,在5~45℃内,该激光器可高性能工作,45℃时,输出功率仍可超过100W。在泵浦电流80A、重复频率20Hz下,3:2:1模块的最大峰值功率达302.8W,整体波动性为17.83%,均优于单波长模块。多波长模块通过多波段补偿机制,在极端温度下仍保持较高稳定性。The application demand of solid-state lasers continues to grow,and traditional Nd:YAG lasers are faced with high cost,high power consumption and poor mechanical properties due to the dependence on complex temperature control systems,which need to be solved urgently in order to expand applications.In this paper,an uncooled multi-wavelength VCSEL pumped solid-state laser design scheme is proposed,aiming to achieve high power stable output over a wide temperature region by optimizing multi-wavelength VCSEL combination.A three-wavelength VCSEL array was used as a pump source to side-pump Nd:YAG crystals with a size of φ6 mm×40 mm and a doping concentration of 1.O at.%.Wavelength complementation of multi-wavelength VCSEL arrays effectively reduces the influence of temperature drift on crystal absorption efficiency.At the same time,the four-sided pump design improves the utilization rate of pump light range and the uniformity of particle number inversion.The experimental results show that the laser can work with high performance at 5~45℃,and the output power can still exceed 100 W at 45 C.Under the pump current of 80 A and repetition frequency of 20 Hz,the maximum peak power of 3:2:1 module reaches 302.8 W,

关 键 词：多波长VCSEL阵列 宽温区 固体激光器 非制冷 

分 类 号：TN248.1[电子电信—物理电子学] O437[机械工程—光学工程]