热阴极与冷阴极电离规稳定性的比较研究  

COMPARISON OF THE STABILITY OF HOT AND COLD CATHODE IONIZATION GAUGES

作　　者：李得天[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2002年第4期201-210,共10页Vacuum and Cryogenics

摘　　要：电离规作为参考标准或副标准时,稳定性尤为重要。通常在校准服务中,只有热阴极电离规用作参考标准或副标准,不采用冷阴极电离规的传统原因是冷阴极电离规的非连续性、低压力下放电延迟效应以及它的不稳定性等。尽管现代反磁控型冷阴极电离规被认为解决了这些问题,但没有足够的数据来证明这些特性。作者介绍了对3个热阴极电离规和2个反磁控型冷阴极电离规的校准结果,校准采用的是高真空基础标准,校准范围为10-7～10-3Pa,校准气体包括N2、Ar、He和H2。在1×10-4Pa恒定压力下连续72h观测中,热阴极电离规在N2、Ar和He中的稳定性优于反磁控规,但在H2中所有规的稳定性相似。在6个月的重复校准中,所有规在N2、Ar和He中的长期稳定性相似,但在H2中反磁控规的长期稳定性优于热阴极电离规。对于不同的气体,反磁控规的非连续性出现在不同的压力点,反磁控规的非连续性使校准工作变得更为复杂。The stabilities are most important features when ionization gauges are used as reference or secondary standards. Generally, only hot cathode gauges are used as reference or secondary standards in calibration services. Some reasons preventing the use of cold cathode gauges are the presence of discontinuities in the current versus pressure characteristic, the ignition delay at very low pressures, and the poor stability especially under contaminating vacuum environments. Though modern inverted magnetron designs are believed to avoid some of these problems at least under clean conditions, no 'hard facts' have been published to support this believe. The experimental results of calibrations of three hot cathode gauges and two inverted magnetrons against a primary high\|vacuum standard over the range 10\+\{-7\} to 10\+\{-3\} Pa with gases of N\-2, Ar, He and H\-2 are presented respectively. During a continuous observation period of 72 h at a constant pressure of about 1×10\+\{-4\} Pa, hot cathode gauges showed better stabilities than inverted magnetrons in N\-2, Ar and He, but all gauges behaved similar in H\-2. Repeated calibrations over a period of about 6 months showed that all gauges had similar long-term stabilities in N\-2, Ar and He. For H\-2, however, the stability of inverted magnetrons was better than that of hot cathode gauges. Toward different gases, the discontinuities of inverted magnetrons occurred at different pressures, making their calibrations more elaborate.\;

关 键 词：热阴极电离规 冷阴极电离规 稳定性 比较研究 校准 真空测量 

分 类 号：TB771[一般工业技术—真空技术] TN107[电子电信—物理电子学]