二次电子能量分析器  

Secondary Electron Energy Analyzer

作　　者：余健业[1] 刘绪平[1] 黄兰友 

机构地区：[1]中国科学院科学仪器厂

出　　处：《电子显微学报》1992年第2期144-151,共8页Journal of Chinese Electron Microscopy Society

摘　　要：本文简明地讨论了二次电子能量分析器的基本原理和设计要点。介绍了我们的实验系统和初步的实验结果,达到了优于10毫伏的电压分辨率。This paper dircusses the basic principles of secondary electron energy analyzer and its deeign considerations. It have been setted to scanning electron micraseope. Preliminary results show that it has attained a valtage resolution of batter than lOmV. The secondary electron energy analyzer can be used for static and dynamic measurements, for qualitative aswill as quantitative measurements. It can monitor the voltage waveform at any node It is therefore an important instrument for failure analysis and for design verification in laboratories, or for quality control on the productive lines.

关 键 词：VLSI 检测 电子能量 分析仪 

分 类 号：TN470.7[电子电信—微电子学与固体电子学]