等离子喷涂ZrO_28Y_2O_3涂层厚度测量方法研究  

Studies on Measurement of Plasma-sprayed ZrO_28Y_2O_3 Coating Thickness

作　　者：周晨波[1] 于文英[1] 邹华[1] 刘方军[2] 段爱琴[2] 

机构地区：[1]山东烟台大学光电信息学院,烟台264005 [2]北京航空工艺研究所,北京100024

出　　处：《光电子．激光》2003年第1期71-74,共4页Journal of Optoelectronics·Laser

摘　　要：提出了利用激光非接触点扫描测量涂层厚度的方法。研究了激光照射新型材料 Zr O2 8Y2 O3涂层粗糙表面上光点的高斯分布 ,并利用扫描电子显微镜得到了涂层粗糙表面的显微精细结构。采用激光 -面阵 CCD传感器 -计算机数字图像处理技术测量涂层厚度。实验结果表明 :所提出的测量方法是可行的 ,测量涂层厚度的重复性误差在± 5 μm范围内。A measurement method of coating thickness with the scanning of laser non contacted spots was proposed.The Gauss distribution of the laser spots on the rough surface with a novel material ZrO 28Y 2O 3 had been studied.The microstructure of the rough surface was obtained using Scanning Electron Microscope.The results shown that the method proposed is feasible and the repeatability measurement error is ±5 μm.

关 键 词：ZrO28Y2O3涂层 测量方法 等离子热喷涂 涂层厚度 激光 CCD 图像处理 

分 类 号：TN304[电子电信—物理电子学] TN247