光谱仪的微型化及其应用  

Micromation and applications of spectrometers

作　　者：史俊锋[1] 惠梅[1] 王东生[1] 毛文炜[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《光学技术》2003年第1期13-16,20,共5页Optical Technique

摘　　要：和传统光谱仪相比,微型光谱仪的分辨率较低,但由于它体较小、价格便宜等优点广泛应用于许多测量、控制领域。讨论了微型光谱仪结构特点、关键技术和发展趋势;对多种微型光谱仪的工作原理和相应的工艺流程做了较为详细的总结;结合国内微型光机电系统制作工艺,分析了几类微型光谱仪的制作难点及其设计方案的可行性。探讨了在分辨率要求不太高的情况下微型光谱仪的多个潜在应用领域。Compared to bulky macroscopic devices, microspectrometer has inferior spectral resolution but its small size and low cost compensate for this limitation in many applications. The configuration traits, recent advances and development tendency of microspectrometer were reviewed. The principle, fabrication technology of several kinds of microspectrometers were summarized, and in particular, feasibility of design schemes considering micro-opto-electro-mechanical system fabrication techniques in our country. Many potential application where not need resolving power were discussed.

关 键 词：微型光机电系统 微型光谱仪 芯片系统 

分 类 号：TH744.1[机械工程—光学工程]