多孔硅结构电镜图像的数字处理  

Imaging Processing in Scanning Electron Microscopy Photograph of Porous Silicon

作　　者：李格[1] 

机构地区：[1]江苏石油化工学院计算机科学与工程系,江苏常州213016

出　　处：《江苏石油化工学院学报》2002年第4期39-41,共3页Journal of Jiangsu Institute of Petrochemical Technology

摘　　要：多孔硅在光电子和传感器领域是一种具有重要应用价值的材料,多孔硅网络结构的形状纹理直接影响其光学和热学性能。运用数字图像处理分析方法对多孔硅结构电子显微镜图像(SEM)进行特征提取,为多孔化率的测定提供了重要依据。Porous silicon has important application in the field of photoelectron and sensors.The porosity of the porous silicon directly influences its optical and electrical properties.In this paper the imaging analysis in SEM photograph of the porous silicon acting as pyroelectric sensor substrate was used to identify the porosity and other structure characteristics of the porous silicon.

关 键 词：多孔硅结构 电镜图像 数字处理 图像处理 纹理分析 多孔化率 

分 类 号：TN304.12[电子电信—物理电子学] TP3[自动化与计算机技术—计算机科学与技术]