压力传感器的应力计算  

Stress Calculation of Pressure Sensor

作　　者：周倜[1] 李格[2] 李金华[1] 

机构地区：[1]江苏石油化工学院功能材料实验室,江苏常州213016 [2]江苏石油化工学院

出　　处：《江苏石油化工学院学报》2002年第4期47-49,共3页Journal of Jiangsu Institute of Petrochemical Technology

摘　　要：从弹性力学的板壳理论出发,对不同参数的凸型板结构形变膜受压后的应力分布作了近似计算,为高线性度SOI压力传感器的芯片设计提供了理论指导。用BESOI技术研制的凸型板结构集成压力传感器的非线性度达0 09%,样品灵敏度的实测值与应力计算理论值的差别约17%。The stress distribution on the convex plate of different sizes under uniform pressure was calculated approximately by plate-shell theory of elastic-mechanics.It could provide a theoretical guide for chip design of high linearity pressure sensor. A BESOI pressure sensor with un-linearity of 009% was prepared on a convex beam,the difference of the output sensitivity between theoretical calculation and the measurement result was about 17%.

关 键 词：压力传感器 应力计算 板壳理论 弹性力学 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]